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Detection tool for boss of ring piece and detection method and application of detection tool

A detection method and ring technology, applied in the detection field, can solve the problems of increasing workload, reducing work efficiency, prolonging detection working hours, etc., and achieve the effects of easy processing, saving labor costs and saving detection working hours

Pending Publication Date: 2021-11-02
KONFOONG MATERIALS INTERNATIONAL CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] At present, the three-coordinate measurement method is used to measure batch parts, and the size of each ring boss needs to be measured separately, and the data is recorded to form a three-coordinate inspection report, which prolongs the inspection time, increases the workload, and reduces the work efficiency. Therefore, It is necessary to develop a checking tool and method for measuring the boss of the ring to improve the detection efficiency of the ring

Method used

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  • Detection tool for boss of ring piece and detection method and application of detection tool
  • Detection tool for boss of ring piece and detection method and application of detection tool
  • Detection tool for boss of ring piece and detection method and application of detection tool

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0053] In this embodiment, a method for measuring ring bosses 5 is provided. First, seven ring bosses 5 and a checker provided on the same ring are provided. Use the inspection tool to measure whether the seven ring bosses 5 are qualified, and then use a caliper to extract one of the ring bosses 5 to measure its size, and record the data.

[0054] Wherein the inspection tool includes the base 1, such as figure 1 As shown, seven molds are arranged side by side on the surface of the base 1, the mold includes an upper mold assembly 2 and a lower mold assembly 3, the lower mold assembly 3 is fixed on the surface of the base 1, and the ring boss 5 is placed on the upper mold assembly 2 Inside, the upper mold assembly 2 and the lower mold assembly 3 are fastened together.

[0055] The lower mold assembly 3 is an annular boss structure, two symmetrical openings are arranged on the surface of the lower mold assembly 3, the width of the opening is smaller than the inner diameter of th...

Embodiment 2

[0065] In this embodiment, a method for measuring ring bosses 5 is provided. First, five ring bosses 5 and a checker provided on the same ring are provided. Check whether the five ring bosses 5 are qualified, extract one of the ring bosses 5 and measure its size with a caliper, and record the data.

[0066] The inspection tool includes a base 1, and five molds are arranged side by side on the surface of the base 1. The mold includes an upper mold assembly 2 and a lower mold assembly 3. The lower mold assembly 3 is fixed on the surface of the base 1, and the ring boss 5 is placed on the upper surface. In the mold assembly 2, the upper mold assembly 2 and the lower mold assembly 3 are fastened together.

[0067] The lower mold assembly 3 is an annular boss structure, two symmetrical openings are arranged on the surface of the lower mold assembly 3, the width of the opening is smaller than the inner diameter of the lower mold assembly 3, and a cushion is provided at the joint bet...

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Abstract

The invention provides a detection tool for a ring boss and a detection method and application of the detection tool. The testing fixture for the boss of the ring piece comprises a base and a die, wherein the die comprises an upper die assembly and a lower die assembly; the lower die assembly is fixed to the surface of the base, the ring piece boss is arranged in the upper die assembly, and then the upper die assembly and the lower die assembly are buckled; when the upper die assembly completely covers the lower die assembly, the ring part boss is detected to be qualified. The detection tool for the ring part bosses is simple in structure, easy to machine, capable of detecting whether the ring part bosses meet the standard or not at the same time, high in detection efficiency and capable of saving detection time and labor cost and guaranteeing accuracy in the mode of full detection of the detection tool and sampling detection of one ring part boss through a caliper.

Description

technical field [0001] The invention belongs to the technical field of detection, and relates to a testing tool for a boss of a ring, in particular to a testing tool for a boss of a ring, a testing method and an application thereof. Background technique [0002] The ring used in the semiconductor physical vapor deposition production process is provided with 7 or 5 protrusions, which are used to be installed on the sputtering machine, and also play a role in electrification. After processing, it is necessary to detect the size of the protrusion on the ring, and batch products cause a large production pressure on the detection process, resulting in a production bottleneck. In the field of mechanical processing, a three-coordinate measuring machine is often used to detect the size of parts, but when using a three-coordinate measuring machine to detect parts, it must ensure that the shape of the part itself remains unchanged, and each protrusion must be measured separately, and ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B5/00G01B5/06G01B5/08
CPCG01B5/00G01B5/06G01B5/08
Inventor 姚力军边逸军潘杰王学泽杨其垚
Owner KONFOONG MATERIALS INTERNATIONAL CO LTD
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