Dry-type modified grinding method and system for hard and brittle materials

A dry modification technology for hard and brittle materials, applied in grinding/polishing equipment, grinding machines, stone processing equipment, etc., can solve the problems of difficulty in preparing special grinding wheels for ultra-fine abrasive wheels and difficult recovery of wet modification fluids, etc. Achieve the effect of low surface roughness and low grinding process

Inactive Publication Date: 2021-11-12
SHANGHAI JIAO TONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the above-mentioned patent documents still have the disadvantages that the wet modification liquid is diff...

Method used

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  • Dry-type modified grinding method and system for hard and brittle materials
  • Dry-type modified grinding method and system for hard and brittle materials

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Embodiment 1

[0033] like figure 1 and figure 2 As shown, a dry modified grinding method for hard and brittle materials provided in this embodiment includes the following steps:

[0034] Step 1: Atmospheric plasma 3 is generated by the atmospheric plasma nozzle 2, and the atmospheric plasma nozzle 2 moves along the planned path 4 to process the hard and brittle material surface 6 of the hard and brittle material 1, and performs dry modification on the hard and brittle material surface 6; according to For the type of hard and brittle material 1, different mixed gases are selected to form atmospheric plasma 3, and the distance between the trajectory of atmospheric plasma nozzle 2 is adjusted according to the difference between the grinding surface and the microstructure; A hard and brittle material undergoing chemical action, the hard and brittle material 1 is one of quartz glass, sapphire, single crystal diamond or single crystal silicon carbide.

[0035] Step 2: Grinding the dry modified...

Embodiment 2

[0037] The present invention also provides a dry modified grinding system for hard and brittle materials, which includes the following modules:

[0038] Modification module: the atmospheric plasma 3 is generated by the atmospheric plasma nozzle 2, and the atmospheric plasma nozzle 2 moves along the planned path 4 to process the hard and brittle material surface 6 of the hard and brittle material 1, and performs dry modification on the hard and brittle material surface 6;

[0039] Processing module: the grinding tool 5 is controlled by a numerical control grinding machine to perform grinding processing on the surface 6 of the dry modified hard and brittle material.

Embodiment 3

[0041] Those skilled in the art can understand this embodiment as a more specific description of Embodiment 1 and Embodiment 2.

[0042] A dry modified grinding method for hard and brittle materials provided in this embodiment includes: Atmospheric plasma selection step for hard and brittle materials: For the type of hard and brittle materials, select the atmospheric plasma that can chemically react with the material to generate a mixed gas ; Atmospheric plasma dry modification step: Use atmospheric plasma nozzle to modify the surface of hard and brittle materials along the moving track; Processing control step: Control grinding wheel feeding and grinding to process hard and brittle materials by CNC machine tools to efficiently obtain low surface roughness Grinding the workpiece.

[0043] Specifically, a diamond grinding wheel is used to grind the surface of the workpiece dry modified by atmospheric plasma through a numerically controlled grinding machine with a minimum resolu...

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Abstract

The invention provides a dry-type modified grinding method and system for a hard and brittle material. The dry-type modified grinding method comprises the following steps: 1, generating atmospheric plasma through an atmospheric plasma spray head, enabling the atmospheric plasma spray head to move along a planned path to treat the surface of the hard and brittle material, and carrying out dry-type modification on the surface of the hard and brittle material; and 2, controlling a grinding tool through a numerical control grinding machine to conduct grinding machining on the surface of the hard and brittle material subjected to dry-type modification. According to the dry-type modified grinding method and system for the hard and brittle material, the problems that in wet-type modification of the hard and brittle material, a modification solution is difficult to treat, a super-hard and brittle material is difficult to machine by grinding of a soft abrasive grinding wheel, and a special soft and hard abrasive mixed grinding wheel is difficult to prepare can be solved, and efficient low-surface-roughness grinding machining of the hard and brittle material is achieved.

Description

technical field [0001] The present invention relates to the technical field of grinding processing on the surface of hard and brittle materials, in particular to a dry modified grinding method for hard and brittle materials, especially an atmospheric plasma dry modified grinding method for hard and brittle materials processing methods. Background technique [0002] At present, hard and brittle materials such as optical components (quartz glass, sapphire and single crystal diamond, etc.), semiconductor components (single crystal silicon carbide, etc.) require high-quality surfaces. These components are difficult to process due to their high hardness and brittleness, and most of them use wet chemical modification, the application of ultra-fine grinding wheels and the combination of special soft and hard abrasive grains. However, a major problem in wet modification is that the chemical modification fluid is difficult to process and recycle. The application of ultra-fine grindi...

Claims

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Application Information

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IPC IPC(8): B24B1/00B24B19/22B28D1/00B28D5/04
CPCB24B1/00B24B19/22B28D1/00B28D5/04
Inventor 张龙朱利民郭鹏
Owner SHANGHAI JIAO TONG UNIV
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