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Miniature gyroscope interface circuit

An interface circuit and micro-gyroscope technology, applied in gyroscope/steering sensing equipment, gyro effect for speed measurement, instrument and other directions, can solve the problem of micro-gyroscope symmetry not reaching the ideal state, structural and environmental errors, and dependent device symmetry In order to achieve the effects of improving stability and accuracy, easy design, and reducing signal interference of feedthrough capacitors

Active Publication Date: 2021-11-12
SHANGHAI JIAO TONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, this patent document needs to prepare two highly symmetrical MEMS resonators to generate equal feedthrough currents, the process is complicated, and due to errors in process, structure and environment, the symmetry of the micro gyroscope cannot reach the ideal state, and The effect of this method depends heavily on the symmetry of the device, and it will not be able to completely cancel the feedthrough effect when the symmetry is poor

Method used

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  • Miniature gyroscope interface circuit
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  • Miniature gyroscope interface circuit

Examples

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Embodiment 1

[0061] A fully differential micro-gyroscope interface circuit combined with an anti-phase feedthrough cancellation circuit, comprising: a differential drive structure, a differential detection structure, two anti-phase feedthrough cancellation structures, a filter, and an ADC driver; wherein:

[0062] The driving signal is converted into a balanced differential signal through the differential driving structure, which is used to drive the micro gyroscope. The differential detection structure will detect the differential signal generated by the micro gyroscope and subtract it from the signal. The two anti-phase feedthrough cancellation structures are connected separately Between the two sets of drive electrodes and the detection electrodes, the error caused by the asymmetry of the differential circuit is adjusted, and the feed-through signal is completely eliminated; the signal is eliminated by the band-pass filter, and finally output to the subsequent digital signal processing mo...

Embodiment 2

[0065] Such as figure 1 As shown, in the fully differential micro-gyroscope interface circuit combined with the anti-phase feedthrough elimination circuit in Embodiment 1 of the present invention, the drive signal is converted into a balanced differential signal through the differential drive structure for micro-gyroscope drive, and the differential detection structure will Detect the differential signal generated by the micro gyroscope and subtract it. Two anti-phase feedthrough cancellation structures are respectively connected between the two sets of driving electrodes and the detection electrodes to adjust the error caused by the asymmetry of the differential circuit. Complete elimination; the signal passes through the filter to eliminate the clutter, and finally outputs to the subsequent digital signal processing module through the ADC driver.

[0066] In this example, the signal input end of the differential drive structure uses a low-pass filter to smooth the ladder-sha...

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Abstract

The invention provides a miniature gyroscope interface circuit, which is characterized in that the input end of a differential driving module is connected with a network analyzer, the first output end of the differential driving module is connected with the input end of a first reverse-phase feed-through cancelling module, the second output end of the differential driving module is connected with the input end of a second reverse-phase feed-through cancelling module, the output end of the first reverse-phase feed-through cancelling module is connected with the first input end of a differential detection module, the output end of the second reverse-phase feed-through cancelling module is connected with the second input end of the differential detection module, the output end of the differential detection module is connected with the input end of a filter, the output end of the filter is connected with the input end of a driver, and the output end of the driver is connected with the network analyzer. According to the invention, two highly symmetrical MEMS resonators do not need to be prepared, self-elimination of feed-through signals is achieved, the feed-through signals are completely eliminated under the condition that driving force is not reduced, and the stability and accuracy of measured signals can be greatly improved.

Description

technical field [0001] The present invention relates to the field of micro-electromechanical technology, in particular to a micro-gyroscope interface circuit, especially a fully differential gyroscope interface circuit combined with an anti-phase feedthrough elimination circuit. Background technique [0002] Gyroscope is an inertial device that can detect the angle or angular velocity of the carrier, and it plays a very important role in the fields of attitude control, navigation and positioning. With the development of national defense technology and aviation and aerospace industries, the requirements of inertial navigation systems for gyroscopes are also developing in the direction of low cost, small size, high precision, multi-axis detection, high reliability, and adaptability to various harsh environments. Therefore, the importance of MEMS micro-gyro is self-evident. [0003] For the field of micro-gyroscope measurement and control, the direct coupling interference betw...

Claims

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Application Information

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IPC IPC(8): G01C19/00
CPCG01C19/00
Inventor 张卫平刘敏茜谷留涛王子杰
Owner SHANGHAI JIAO TONG UNIV