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Magnetic sensor and manufacturing method thereof

A technology of a magnetic sensor and a manufacturing method, which is applied in the field of magnetic sensors and can solve problems such as structural application of magnetic detection elements

Inactive Publication Date: 2004-01-28
SUMITOMO SPECIAL METAL CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Therefore, it is impossible to apply the structure including the above-mentioned magnetic detection element to the orthogonal magnetic gate element

Method used

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  • Magnetic sensor and manufacturing method thereof
  • Magnetic sensor and manufacturing method thereof
  • Magnetic sensor and manufacturing method thereof

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Experimental program
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Embodiment Construction

[0059] Figure 5 is a schematic diagram showing the structure of a magnetic sensor of the orthogonal magnetic gate type according to the first embodiment of the present invention; Figure 6A is a sectional view showing the structure of the first embodiment (in which the detection coil is not shown); and Figure 6B is shown viewed from the right Figure 6A A view of the structure (in which the detection coil is not shown). In these figures, reference numeral 1 is an inner conductor, 2 is an outer conductor, 3 is a magnetic core, 4 is a detection coil, and 5 is a high-frequency power supply.

[0060] The inner conductor 1 is made of known metal or other conductive material, and is formed in a cylindrical shape. Specifically, the inner conductor 1 is preferably made of a non-magnetic material so that the adverse effects of offset and hysteresis due to residual magnetization are not applied to the magnetic core 3, for example, the material may be selected from Cu, Al, etc. Mat...

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PUM

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Abstract

A magnetic sensor of orthogonal flux-gate type is provided with a cylindrical core (3) made of a soft magnetic material; an internal conductor (1) that is placed inside the core; a detection coil (4) wound up on the core; and an external conductor (2) that is placed around the core (3) and electrically connected to the internal conductor (1). A high-frequency current is allowed to flow through the internal core (1) so that a magnetic field to be measured which resides around the detection coil (4) is changed and the intensity and direction of the magnetic field to be measured is detected on the basis of an output of the detection coil (4). Since the external conductor (2) is placed on the periphery of the core (3), it is possible to prevent the magnetic flux formed by the core (3) from magnetizing any space, and consequently to concentrate the magnetic field on the core.

Description

technical field [0001] The present invention relates to a magnetic sensor of the orthogonal magnetic gate type for detecting the strength and direction of a magnetic field and a method of manufacturing such a sensor. Background technique [0002] Recently, the demand for small-sized and inexpensive magnetic sensors that have high precision and can detect magnetic field strength and magnetic field direction has been increasing; Detection sensors, magnetic sensors used as electronic compass and navigation systems on vehicle equipment, magnetic sensors used to measure the magnetic field of living bodies such as the heart, and magnetic sensors used in non-destructive testing of steel, etc. [0003] As for conventional magnetic sensors of this type, there are, for example, Hall elements, MR elements, MI elements, superconducting quantum interference devices (SQUIDs), parallel or quadrature magnetic fluxgate type magnetic sensors, and the like. Among these elements, the Hall elem...

Claims

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Application Information

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IPC IPC(8): G01R33/04G01R33/02
CPCG01R15/185G01R33/04G01R33/02Y10T29/49073Y10T29/4902Y10T29/49007Y10T29/49078
Inventor 川上诚
Owner SUMITOMO SPECIAL METAL CO LTD