Method and device for storing epitaxial wafers

A storage device and epitaxial wafer technology, applied in the field of epitaxial wafer storage, can solve the problems of unfavorable epitaxial wafer transportation and storage, easily damaged epitaxial wafers, etc., and achieve the effects of facilitating temperature and humidity adjustment, enhancing stability, and flexible use

Active Publication Date: 2022-02-08
JIANGSU HUAXING LASER TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0002] The epitaxial wafer is a kind of precision product. The epitaxial wafer after production needs special protection during storage and transportation to avoid damage. In the prior art, when storing and transporting the epitaxial wafer, most of them just wrap a piece of paper outside the epitaxial wafer. cartons, and fixed with brackets made of foam materials to prevent the epitaxial wafers from being damaged by collisions. The existing scheme is not conducive to the transfer and storage of epitaxial wafers. In some workshops with high temperature and high humidity, there is Will easily damage the epitaxial wafer

Method used

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  • Method and device for storing epitaxial wafers
  • Method and device for storing epitaxial wafers
  • Method and device for storing epitaxial wafers

Examples

Experimental program
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Effect test

Embodiment 1

[0038] Such as Figure 1-Figure 10 As shown, a storage device for epitaxial wafers includes a storage box 1, the storage box 1 includes a moisture-proof cover 2 and a placement body 3, and a bottom edge plate 4 is fixedly connected to the outer surface of the placement body 3 near the bottom. , the bottom edge plate 4 is arranged symmetrically with respect to the placement main body 3, and the outer surface of the bottom edge plate 4 is provided with a through hole;

[0039] The main body 3 is placed, the upper end of the main body 3 is open, and the upper card box 8 is fixedly connected to the opening, the outer surface of the main body 3 is provided with an access window, and the inner surface of the main body 3 is connected with Access window cover 6, described access window cover 6 closes described access window, and the inside of described placing main body 3 is provided with at least one group of placing compartments 36, and the quantity of described placing compartments...

Embodiment 2

[0050] On the basis of the above-mentioned embodiment 1, a method for storing epitaxial wafers, the method includes the epitaxial wafer storage device in the above-mentioned embodiment 1, and the method also includes: A, placing the upper card box 8 in the main body 3 Place the dehumidification agent, seal the upper port of the main body 3 and the upper card box 8 through the moisture-proof cover plate 2; The column passes through the through hole on the bottom of the board 4, and the storage box 1 is transported by the conveyor belt; C. After the storage box 1 is moved to the designated position, the access window cover 6 is opened, and the flat plate 19 is driven by the driving device to extend. Out of the access window, after the placement mechanism places the epitaxial wafers on the surface of the placement flat plate 19, the drive device drives the placement flat plate 19 back into the placement compartment 36, closes the access window cover 6, and continues to transport t...

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Abstract

The invention relates to a storage method and device for epitaxial wafers. The storage device for the epitaxial wafer includes a storage box, the storage box includes a moisture-proof cover plate and a placement body, the outer surface of the placement body is fixedly connected with a bottom edge plate at a position close to the bottom, and the bottom edge plate is opposite to the placement body Symmetrically arranged, the bottom is provided with a through hole along the outer surface of the board; the main body is placed, the upper end of the main body is open, and an upper card box is fixedly connected to the opening, and an access window is opened on the outer surface of the main body. The inner surface of the placement main body is connected with an access window cover, the access window cover closes the access window, and at least one group of placement compartments is arranged inside the placement main body, and the number of the placement compartments is the same as that of the access window. The quantity is corresponding; the placement compartment is provided with a flat plate, and the epitaxial wafer is placed on the surface of the flat plate; the storage method and device of the epitaxial wafer are ingenious in design, flexible in use, and convenient for storage and use of the epitaxial wafer.

Description

technical field [0001] The invention belongs to the technical field of epitaxial wafer storage, and in particular relates to a storage method and device for epitaxial wafers. Background technique [0002] The epitaxial wafer is a kind of precision product. The epitaxial wafer after production needs special protection during storage and transportation to avoid damage. In the prior art, when storing and transporting the epitaxial wafer, most of them just wrap a piece of paper outside the epitaxial wafer. cartons, and fixed with brackets made of foam materials to prevent the epitaxial wafers from being damaged by collisions. The existing scheme is not conducive to the transfer and storage of epitaxial wafers. In some workshops with high temperature and high humidity, there is The epitaxial wafer will be easily damaged. Contents of the invention [0003] The object of the present invention is to provide a storage method and device for epitaxial wafers with simple structure an...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B65D81/26B65D81/18B65D25/38B65G15/58B65G1/04
Inventor 徐鹏飞王文知王岩罗帅季海铭
Owner JIANGSU HUAXING LASER TECH CO LTD
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