Line spectrum confocal sensor

A sensor and line spectrum technology, applied in the field of online spectral confocal sensors, can solve problems such as poor measurement accuracy, and achieve the effects of convenient heat dissipation, optical path effect, and accuracy requirements.

Pending Publication Date: 2021-11-23
SEIZET TECH SHEN ZHEN CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] In view of this, it is necessary to provide a line spectrum confocal sensor to solve the problem of poor measurement accuracy in the prior art

Method used

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  • Line spectrum confocal sensor
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Embodiment Construction

[0034] Preferred embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings, wherein the accompanying drawings constitute a part of the application and together with the embodiments of the present invention are used to explain the principle of the present invention and are not intended to limit the scope of the present invention.

[0035] Such as Figure 1-3 As shown, a line spectrum confocal sensor in this embodiment is characterized in that it includes: a light source 10 , a light source fiber 20 , a dispersion objective lens 30 , a spectrometer 40 , a spectrometer fiber 50 and a spectrometer fiber fixing structure 60 .

[0036] The light source 10 is used to generate detection light.

[0037] The light source fiber 20 is used to convert the detection light into modulated detection light, and the light source fiber 20 includes a first light incident end 21 coupled with the light source and a first light exit coupled w...

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Abstract

The invention relates to a line spectrum confocal sensor which comprises a light source, a light source optical fiber, a dispersion objective lens, a spectrograph, a spectrograph optical fiber and a spectrograph optical fiber fixing structure. The spectrograph optical fiber fixing structure is used for fixing the second light inlet end and comprises an X-direction sliding block, a Y-direction sliding block and a bottom plate, the Y-direction sliding block is detachably connected with the X-direction sliding block in a sliding mode in the Y-axis direction, and the relative positions of the X-direction sliding block and the Y-direction sliding block are locked through a locking piece. An open hole is formed in the Y-direction sliding block, the second light inlet end open hole is formed in the open hole in an axial sliding mode and can be pressed to an opening of the open hole through a limiting piece so as to fix the second light inlet end, the axial direction of the open hole is arranged in the width direction of the X-direction sliding block, and an X-direction sliding block groove formed in the length direction of the X-direction sliding block is formed in the bottom of the X-direction sliding block; a boss corresponding to the X-direction sliding block groove is arranged on the bottom plate. The spectrometer optical fiber fixing structure solves the problem of poor measurement precision.

Description

technical field [0001] The invention relates to the technical field of 3D precision measurement, in particular to a line spectrum confocal sensor. Background technique [0002] With the rapid development of precision and ultra-precision manufacturing, the demand for high-precision detection is also increasing, so high-precision displacement sensors have also emerged as the times require. The precision of the ultra-precise displacement sensor can reach the micron level. Although the traditional contact measurement has high precision, it may scratch the surface of the measured object, and when the measured object is weak rigidity or light soft material, the contact measurement will also cause elastic deformation, the introduction of measurement In addition, the contact measurement speed is slow and it is difficult to realize automatic measurement. Based on the many shortcomings of contact measurement, non-contact displacement sensors have received greater attention. [0003]...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01J3/28G01J3/02
CPCG01J3/2823G01J3/0205G01J3/0202
Inventor 杨宇翔胡浩
Owner SEIZET TECH SHEN ZHEN CO LTD
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