Method for controlling post-welding tensile force of induction diaphragm of capacitive film vacuum gauge

A control method and sensing membrane technology, applied to vacuum gauges, measuring fluid pressure, measuring devices, etc., can solve problems such as high trial and error costs, low product qualification rate, and large randomness of diaphragm tension, and improve product quality. The pass rate, the realization of precise control, and the effect of process control

Active Publication Date: 2021-12-03
JIHUA LAB
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Problems solved by technology

[0004] In this way, it is necessary to adjust the welding process parameters many times to carry out multiple welding tests. The process of determining the welding process parameters is complicated, the cost of

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  • Method for controlling post-welding tensile force of induction diaphragm of capacitive film vacuum gauge
  • Method for controlling post-welding tensile force of induction diaphragm of capacitive film vacuum gauge
  • Method for controlling post-welding tensile force of induction diaphragm of capacitive film vacuum gauge

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[0037] Next, the technical solutions in the present application will be described in conjunction with the present application embodiments, and it is clear that the described embodiments are merely described herein, not all of the embodiments of the present application. Components of the present application embodiments described and illustrated in the drawings herein can be arranged and designed in a variety of different configurations. Thus, the following detailed description of the embodiments of the present application provided in the drawings is not intended to limit the scope of the present application claimed, but only the selected embodiments of the present application. Based on the embodiments of the present application, those skilled in the art will belong to the scope of this application under the premise of creative labor.

[0038] It should be noted that similar reference numerals and letters represent the similar items in the following figures, and therefore, once one ...

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Abstract

The invention belongs to the technical field of machining and discloses a method for controlling post-welding tensile force of a induction diaphragm of a capacitive film vacuum gauge. The method comprises the following steps that an induction diaphragm is welding at a lower end of a cylindrical cavity of the capacitive film vacuum gauge; the yield strength of the material of the cavity is lower than that of the material of the induction diaphragm; after pressure is applied to the inner wall of the cavity, the pressure is unloaded, so the inner side part of the cavity wall of the cavity, the outer side part of the cavity wall of the cavity and the induction diaphragm are respectively in a plastic deformation state, an elastic deformation state and an elastic tensioning state when the pressure is applied, and the induction diaphragm after the pressure is unloaded has required tensioning force; the post-welding tensile force control method for the induction diaphragm of the capacitive film vacuum gauge is beneficial to realizing accurate control on the tensile force after the induction diaphragm is welded.

Description

technical field [0001] The present application relates to the technical field of mechanical processing, in particular to a method for controlling tension after welding of an induction diaphragm of a capacitive thin film vacuum gauge. Background technique [0002] The cavity of the capacitive thin film vacuum gauge is equipped with a metal induction diaphragm and a fixed electrode plate. When working, the different vacuum degrees of the measured object will cause the metal induction diaphragm to deform accordingly, so that the metal induction diaphragm and the fixed electrode plate The capacitance between them changes accordingly, and the vacuum degree of the measured object is measured according to the change of the capacitance. [0003] Among them, the tension force on the metal sensing diaphragm is directly related to the deformation characteristics of the diaphragm, which in turn has an important impact on key indicators such as measurement accuracy and repeatability of t...

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Application Information

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IPC IPC(8): G01L21/00G01L19/00
CPCG01L21/00G01L19/00
Inventor 侯少毅胡强卫红胡琅刘乔
Owner JIHUA LAB
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