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Hybrid magnet structure

A technology of magnets and permanent magnets, applied in the field of hybrid magnet structures, can solve the problems of contamination of the vacuum cavity, limited change of the magnetic field, and power consumption.

Pending Publication Date: 2021-12-17
ADVANCED ION BEAM TECHNOLOGY INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This kind of gradient magnetic field control through the coil current has the following problems: (1) consumes extra power, increases the carbon footprint of the processed product, and also increases the processing cost; (2) the leakage magnetic field is large, which easily affects the magnetic field of adjacent magnets Strength; (3) The insulating material of the coil will release gas when overheated, affecting or contaminating the vacuum chamber; and (4) The degree of change of the magnetic field is limited

Method used

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Embodiment Construction

[0056] In the following embodiments, "upper", "lower", "front" or "rear" are only used to illustrate their orientations in the drawings, or to facilitate the description of the relative relationship between elements, and are not intended to limit their actual orientation.

[0057] For the convenience of description, the description of the relationship between components and physical quantities in each embodiment of this specification uses a Cartesian coordinate system, wherein the direction of motion of the charged particle beam is defined on the Z-axis direction, and the two dipole magnets arranged oppositely are coplanar and Its N extreme and S extreme are both on the XY plane.

[0058] Unless otherwise defined, the "distance" referred to in the following embodiments refers to the shortest distance between two elements or between specific parts of two elements. Special note here, Figure 5The distance DX2 shown refers to the longest distance between the first extension sec...

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Abstract

The invention provides a hybrid magnet structure, which comprises two opposite dipolar magnet assemblies. Each dipolar magnet assembly comprises a permanent magnet, two iron cores and a movable magnetic field shunting element. The hybrid magnet structure can focus charged particle beams at different positions by applying an adjustable gradient magnetic field in the horizontal or vertical direction of the charged particle beams. According to the invention, the purpose of focusing the charged particle beam is achieved by enabling the charged particle beam to pass through the gradient magnetic field established between the two dipolar magnet assemblies. In addition, the size of the gradient magnetic field can be changed by adjusting the gap between the movable magnetic field shunting element and the permanent magnet, so that the particle beam size of the charged particle beams with different energies or masses in a certain axial direction can be controlled.

Description

technical field [0001] The invention relates to a hybrid magnet structure, in particular to a hybrid magnet structure suitable for the technical field of ion implantation. Background technique [0002] At present, in the field of ion implantation technology, coils are wound on iron cores to manufacture dipole magnets (Dipole magnets) and quadrupole magnets (consisting of two dipole magnets), and in this way A gradient magnetic field is formed between the secondary magnets, and then through this gradient magnetic field, the charged particle beam (such as ion beam) is converged (focused) on a specific axis, such as the Chinese Taiwan TW I679669 patent and the Chinese Taiwan TW I640999 patent stated. [0003] The characteristic of the gradient magnetic field is that the magnetic field at the center of the field is zero, and the magnitude of the magnetic field in a certain axis (such as the Y-axis direction) increases gradually away from the center of the field. During the ope...

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Application Information

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IPC IPC(8): H01F7/02H01J37/317
CPCH01F7/0273H01F7/0278H01J37/3171
Inventor 黄清乡詹智全陈辉煌朱耘谅
Owner ADVANCED ION BEAM TECHNOLOGY INC