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Cutting device

A cutting device and cutting tool technology, which can be used in measuring devices, optical devices, fine working devices, etc., can solve problems such as bearing surface damage, and achieve the effect of preventing the incision from becoming wider.

Pending Publication Date: 2021-12-24
DISCO CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0012] However, in the method disclosed in Patent Document 6, since the judgment is made by bringing the jig into contact with the supporting surface of the cutting tool, the supporting surface may be damaged.

Method used

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Examples

Experimental program
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Effect test

no. 2 Embodiment approach

[0103] Figure 8 The cutting device 100 shown is replaced by a first base 733, a second base 734, an end face corrector (end face correcting member) 90, and a shape measuring device (shape measuring member) 93. figure 1 The first base 731, the second base 732, the end surface corrector 80 and the shape measuring device 83 are shown, and the other parts are the same as figure 1 The cutting device 1 shown is designed in the same way. Hereinafter, parts having the same configuration as the cutting device 1 are marked with and figure 1 Descriptions are omitted because of common reference numerals.

[0104] The first base 733 is fixed to the first column portion 12 , and the second base 734 is fixed to the second column portion 13 .

[0105] The end face corrector 90 is arranged on the +X direction side of the upper parts of the first base 733 and the second base 734 . The correction grinder 91 included in the end face corrector 90 protrudes toward the side closer to the respec...

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PUM

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Abstract

The invention provides a cutting device. The cutting device can confirm whether the supporting surface needs to be corrected or not and check whether the supporting surface is properly corrected or not under the condition that a jig does not make contact with the supporting surface. The cutting device uses a cutting tool to cut a wafer. The cutting device includes: a shape storage unit that stores, as a stored cross-sectional shape, a cross-sectional shape of a support surface of a mounting seat of a cutting unit in an axial direction of a main shaft; a shape measurer that measures the cross-sectional shape of the support surface in the axial direction of the main shaft in a non-contact manner; a determination unit that compares the stored cross-sectional shape stored in the shape storage unit and the measured cross-sectional shape measured by the shape measurer, and determines whether or not correction of the support surface is necessary; and an end surface corrector that corrects the shape of the support surface.

Description

technical field [0001] The present invention relates to a cutting device for cutting a workpiece using a cutting tool. Background technique [0002] A cutting device that cuts a workpiece held by a holding surface of a holding table using a cutting blade rotates the cutting blade and moves the workpiece in a cutting direction of the cutting blade to cut the workpiece. [0003] The cutting tool has a shape like a ring-shaped washer and a hub tool with a grinding wheel formed on an aluminum base by electroforming. The nut screwed with the external thread of the seat clamps and fixes the cutting tool. [0004] Therefore, when the annular plate-shaped cutting tool is fixed to the mount, the support surface of the mount that contacts the cutting tool is damaged, and the support surface becomes uneven. In addition, when a cutting tool of the type in which a grinding wheel is formed annularly on the outer periphery of an aluminum base by electroforming is fixed to a mount, alumin...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B28D5/02B28D7/00B28D7/04B24B7/22B24B41/06H01L21/67G01B11/00G01B11/02G01B11/28G01B17/00
CPCB28D5/023B28D5/0058B28D5/0094B24B7/228B24B41/068H01L21/67092G01B11/00G01B11/02G01B11/28G01B17/00B26D7/01B26D7/12B26D1/15B26D5/00B24B49/003B24B49/12B24B7/16B28D5/022B24B27/06B28D7/04B28D7/005G01B11/24G01B17/06
Inventor 武田俊
Owner DISCO CORP