Transfer vacuum sample holder and vacuum interconnection system

A technology of interconnection system and sample holder, applied in the direction of analysis materials, instruments, etc., can solve the problems of difficult DC heating process, great difference in structure form, difficult sample transfer, etc.

Pending Publication Date: 2022-01-04
SUZHOU INST OF NANO TECH & NANO BIONICS CHINESE ACEDEMY OF SCI
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  • Application Information

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Problems solved by technology

The structural forms of the two sample holders are very different, it is difficult to realize the transfer of s

Method used

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  • Transfer vacuum sample holder and vacuum interconnection system
  • Transfer vacuum sample holder and vacuum interconnection system
  • Transfer vacuum sample holder and vacuum interconnection system

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[0024] In the present invention, the terms "arranged", "provided", and "connected" should be interpreted broadly. For example, it may be a fixed connection, a detachable connection, or an integral structure; it may be a mechanical connection or an electrical connection; it may be a direct connection or an indirect connection through an intermediary; internal connectivity. Those of ordinary skill in the art can understand the specific meanings of the above terms in the present invention according to specific situations.

[0025] The terms "center", "longitudinal", "transverse", "length", "width", "thickness", "top", "bottom", "front", "rear", "left", "right", " The orientations or positional relationships indicated by "vertical", "horizontal", "top", "bottom", "inner", "outer", "axial", "radial", and "circumferential" are based on the drawings The orientation or positional relationship shown is only for the convenience of describing the application and simplifying the descrip...

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Abstract

The invention discloses a transfer vacuum sample holder. The sample holder comprises a second holder body assembly and a thermocouple, wherein the second holder body assembly is provided with a containing groove and a pair of second inserting grooves formed in the two opposite sides of the containing groove, and the two second inserting grooves are the same in extending direction and communicate with the containing groove; the thermocouple is fixed on the second holder body assembly and is positioned at a first end of an accommodating groove; the thermocouple extends to a lower part of the accommodating groove and is used for being in contact with a small sample holder when the two sides of the small sample holder in the width direction are inserted into second inserting grooves from second ends of the accommodating groove. The invention further discloses a vacuum interconnection system. The transfer vacuum sample holder has the function of allowing the small sample holder to be inserted and fixed, can be applied to a near-normal-pressure scanning tunneling microscope and a low-temperature scanning tunneling microscope at the same time, and can enable the thermocouple to be in automatic contact with the small sample holder after the small sample holder is inserted into the transfer vacuum sample holder, so detection of the temperature of a sample is achieved; transfer and vacuum interconnection of samples between two different scanning tunneling microscopes are realized.

Description

technical field [0001] The invention relates to the field of vacuum machinery, in particular to a transfer vacuum sample holder and a vacuum interconnection system. Background technique [0002] Since the artificial vacuum on the earth can achieve a local ultra-clean environment, it is of great significance to the growth, preparation and scientific research of specific materials, such as semiconductor wafer growth, semiconductor device preparation, electron scanning microscope detection of objects, transmission electron Microscopic examination of material interfaces and other processes are carried out in an artificial vacuum environment. In order to make better use of the high cleanliness characteristics of vacuum to continuously study material growth, device preparation, and performance testing, Suzhou Institute of Nanotechnology and Nanobionics, Chinese Academy of Sciences designed and built a vacuum interconnection system. In this vacuum interconnection system, all relat...

Claims

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Application Information

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IPC IPC(8): G01N35/10
CPCG01N35/1004
Inventor 陈志敏丁孙安龚忠苗陆晓鸣魏伟王利凌小伦
Owner SUZHOU INST OF NANO TECH & NANO BIONICS CHINESE ACEDEMY OF SCI
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