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Temperature measuring method and temperature measuring device for constant temperature area of vertical oxidation furnace

A technology of temperature measurement and oxidation furnace, which is applied in the direction of furnace control devices, furnaces, furnace components, etc., can solve the problems of temperature reaching the preset value, failure to verify the uniformity of furnace temperature, and large spacing between layouts, etc., to improve temperature uniformity Effect

Pending Publication Date: 2022-01-07
48TH RES INST OF CHINA ELECTRONICS TECH GROUP CORP
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Usually the measured value of the temperature control of the vertical oxidation furnace comes from the 5 thermocouples arranged on the quartz tube. set value, but cannot represent that the temperature of the entire interval reaches the preset value, so that the temperature uniformity of the furnace cannot be verified

Method used

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  • Temperature measuring method and temperature measuring device for constant temperature area of vertical oxidation furnace
  • Temperature measuring method and temperature measuring device for constant temperature area of vertical oxidation furnace
  • Temperature measuring method and temperature measuring device for constant temperature area of vertical oxidation furnace

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Embodiment Construction

[0030] The present invention will be described in further detail below in conjunction with the accompanying drawings and specific embodiments.

[0031] Such as Figure 1 to Figure 4 As shown, in the temperature measurement method used in the constant temperature zone of the vertical oxidation furnace in this embodiment, a thermocouple perforation is reserved at the bottom of the oxidation furnace 1, and the temperature measurement method includes the following steps:

[0032] S1, the thermocouple 2 is extended into the furnace from the thermocouple perforation at the bottom of the oxidation furnace 1, as figure 1 shown, and move up vertically so that the top of thermocouple 2 is close to the top of the furnace, and the bottom of thermocouple 2 is outside the furnace, as figure 2 shown;

[0033] S2. Raise the thermocouple seat 4 on the lifting mechanism 3 below the oxidation furnace 1 to the upper limit position, and then install the bottom of the thermocouple 2 on the therm...

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Abstract

The invention discloses a temperature measuring method and device for a constant temperature area of a vertical oxidation furnace. The method comprises the steps of extending a thermocouple into the furnace from a thermocouple through hole in the bottom of the oxidation furnace and vertically moving the thermocouple upwards to enable the top of the thermocouple to be close to the top of the furnace; lifting a thermocouple seat on a lifting mechanism below the oxidation furnace to the upper end extreme position, and then installing the bottom of the thermocouple on the thermocouple seat; and driving the thermocouple seat by the lifting mechanism to move from the upper end extreme position to the lower end extreme position at a constant speed, and meanwhile, collecting the measured value of the thermocouple in real time by a controller to obtain a temperature curve in the vertical direction in the furnace. The device comprises a support, the lifting mechanism, the thermocouple seat and the thermocouple, wherein the thermocouple is vertically arranged, and the bottom of the thermocouple is detachably installed on the thermocouple seat. According to the temperature measuring method and device for the constant temperature area of the vertical oxidation furnace, the thermocouple can move at a constant speed in the vertical direction of the furnace body, the temperature in the furnace body is detected and fed back in real time, accurate measurement and uniformity control over the temperature in the oxidation process are achieved, and the temperature uniformity of the constant temperature area of the vertical oxidation furnace is improved.

Description

technical field [0001] The invention relates to furnace body temperature control equipment, in particular to a temperature measuring method and a temperature measuring device used in a constant temperature zone of a vertical oxidation furnace. Background technique [0002] The vigorous development of the information industry has greatly driven the development of the integrated circuit industry. The vertical oxidation diffusion equipment can be used for oxidation, diffusion and annealing processes in the integrated circuit manufacturing process, and is one of the most important process equipment on the integrated circuit production line. The length of the constant temperature zone in the furnace determines the range of the effective production zone, and the temperature uniformity directly affects the uniformity of the film thickness formed on the wafer surface. Usually the measured value of the temperature control of the vertical oxidation furnace comes from the 5 thermocoupl...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F27D21/00F27D19/00
CPCF27D21/0014F27D19/00F27D2019/0003
Inventor 曾裕民万喜新周益华王学仕
Owner 48TH RES INST OF CHINA ELECTRONICS TECH GROUP CORP
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