Ejector pin mechanism horizontal adjusting device

Abstract

The invention provides an ejector pin mechanism horizontal adjusting device which comprises a plurality of ejector pin mechanisms and a plurality of ejector pin adjusting assemblies, wherein each ejector pin mechanism comprises an ejector pin and a jacking structure; the ejector pin adjusting assembly comprises a vertical displacement adjusting unit and an angle adjusting unit, the vertical displacement adjusting unit is connected with a fixing part of the jacking structure through a connecting piece, and adjustment of the vertex of an ejector pin in the height direction is achieved; and the upper end of the angle adjusting unit is fixedly connected with the cavity, and the lower end is fixedly connected with the vertical displacement adjusting unit for adjusting the angle between the ejector pin and the bottom surface of the cavity. According to the device, the ejector pin mechanism can be conveniently installed, the levelness is adjustable, and during installation, the angle between the ejector pins and the bottom surface of the cavity can be rapidly adjusted, so that the plane where the vertexes of the multiple ejector pins are located is enabled to be in a horizontal state; and after the cavity is adjusted to be horizontal, by adjusting the angle between the support and the bottom surface of the cavity, deviation of the vertex of the ejector pin in levelness caused by low machining precision or assembly errors of all equipment can be compensated, and the requirement for the machining precision of the equipment is lowered.

Description

Technical field [0001] The present invention belongs to the technical field of semiconductor equipment, and more particularly to a top needle mechanism horizontal adjustment device. Background technique [0002] In the semiconductor manufacturing process, especially in the field of vacuum coating, the wafer is typically transmitted between the various chambers in the field, and in order to meet the needs of the robot, the needle mechanism is usually used in various chambers. Unexpellent mechanism in the prior art figure 1 As shown, the thimble mechanism is connected to the cavity 102, and the thimble mechanism includes three thimbles 101, and the three thimble 101 are uniformly distributed on the base 103, and the base 103 is disposed vertically, the base 103 is disposed in the bottom of the cavity 102. The bottom portion of the base 103 is provided with a top rising structure, and the top rising structure includes moving end 104 and the fixed end 105, and the movable end 104 can...

AI Technical Summary

Problems solved by technology

[0006] In view of the above-mentioned shortcomings of the prior art, the object of the present invention is to provide a horizontal adjustment device for the thimble mechanism, which is used to solve the problem that the thimble mechanism in the prior art requires high processing precision of the equipment and it is difficult to adjust the level of the plane where the thimble is located during installation. degree of question

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