Vacuum coating device for uniformly distributing metal steam by adopting uniform mixing buffer structure

Abstract

The invention discloses a vacuum coating device for uniformly distributing metal steam by adopting a uniform mixing buffer structure. The vacuum coating device comprises a crucible, an induction heater for heating molten metal in the crucible to form the metal steam is arranged at the outer side of the crucible, the top of the crucible is connected with a flow distribution box body through a metal steam pipeline, a horizontal core rod and a pressure stabilizing plate are arranged in the flow distribution box body, the core rod is positioned below the pressure stabilizing plate, a coating nozzle is arranged at the top of the flow distribution box body, an induction coil is arranged at the outer side of the flow distribution box body, and a pressure regulating valve is arranged on the metal steam pipeline; a plurality of axial heating holes are formed in the core rod, resistance wires are arranged in the heating holes, and a first-stage flow guide plate, a second-stage flow guide plate and a third-stage flow guide plate are arranged on the surface of the core rod; and a buffer groove is formed in the inner wall of the flow distribution box body, and the buffer groove corresponds to the core rod in position. By means of the vacuum coating device, when high-temperature steam is in contact with a low-temperature steel plate, a uniform coating is formed on the surface of the steel plate.

Description

technical field [0001] The invention relates to the technical field of vacuum coating, in particular to a vacuum coating device which adopts a mixing buffer structure to evenly distribute metal vapor. Background technique [0002] Physical vapor deposition (PVD) refers to the process of heating the metal to be plated under vacuum conditions to deposit it on the substrate in a gaseous state to form a coating. According to different heating methods, it is divided into electric heating (resistance or induction) and electron beam gun heating (EBPVD). Vacuum coating, as a surface modification and coating process, has been widely used in electronics, glass, plastics and other industries. The main advantages of vacuum coating technology lie in its environmental protection, good coating performance and the diversity of materials that can be plated. The key to applying vacuum coating technology to continuous strip steel lies in the aspects of continuous coating production, large are...

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Problems solved by technology

[0011]The above-mentioned patents all involve the specific form of nozzles in the coating process, but it does not show that the coatings performed by these nozzles can reach a uniform degree, and the surface of the steel plate The uniformity of the coating is a key factor for its subsequent use such as bending and stamping

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