Plane bending type high-sensitivity acceleration sensor and manufacturing method thereof
An acceleration sensor and sensitivity technology, applied in the direction of velocity/acceleration/impact measurement, acceleration measurement, acceleration measurement using inertial force, etc. The effect of enhancing low frequency characteristics, increasing piezoelectric coefficient, and simple structure
Inactive Publication Date: 2022-01-28
山东利恩斯智能科技有限公司
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[0004] Since the piezoelectric elements of the shear piezoelectric acceleration sensor are installed radially around the fixed central pillar, it is difficult to withstand large elastic deformation, and after a long period of use, the shear piezoelectric acceleration sensor will suffer from the shearing of the mass during the induction process. The shear stress is about, so that the gap between the mass block and the sensitive element is too large, resulting in a decrease in sensitivity
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[0046] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
[0047] In the planar flexural high-sensitivity acceleration sensor provided by the present invention, when it is said that a certain element or layer is "on" another element or layer, and is "connected" or "coupled" to another element or layer, it may be directly On, directly connected to or coupled to another element or layer, intervening elements or layers may also be present. In contrast, when an element is referred to as being "directly on," "directly conn...
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The invention provides a plane bending type high-sensitivity acceleration sensor and a manufacturing method, and relates to the technical field of acceleration sensors, the plane bending type high-sensitivity acceleration sensor comprises a base, and a shell cover and a core body which are respectively connected with the base; a mouthpiece is arranged at one end of the shell cover; the core body is provided with a mass block; the mass block is connected with an upper piezoelectric plate and a lower piezoelectric plate; the upper piezoelectric plate and the lower piezoelectric plate are connected in parallel through a wire, and then the upper piezoelectric plate and the lower piezoelectric plate are electrically connected with the mouthpiece through wires respectively. The mass block is provided with a central column, a disc and a circular ring to form an I-shaped structure, so that the structure has high strength and operation reliability. The upper piezoelectric plate and the lower piezoelectric plate are respectively sleeved on the central column, the upper piezoelectric plate is arranged at the upper end of the disc, and the lower piezoelectric plate is arranged at the lower end of the disc, so that the influence of temperature and base strain on the acceleration sensor is reduced, and the sensitivity of the acceleration sensor is improved.
Description
technical field [0001] The invention relates to the technical field of acceleration sensors, in particular to a planar flexural high-sensitivity acceleration sensor and a manufacturing method. Background technique [0002] The existing shear piezoelectric acceleration sensor obtains the vibration signal through the vibration sensor installed on the surface of the power equipment, extracts the characteristic quantity from it and combines it with data processing to realize the detection. [0003] Such as figure 1 As shown, the shear piezoelectric acceleration sensor has a housing 101, and the piezoelectric sensitive element 102 inside the housing 101 is located between the central column and the shear mass 103, and the piezoelectric element 102 is installed radially around the fixed central column. When receiving external vibration, the shear stress generated by the mass directly acts on the sensitive element. [0004] Since the piezoelectric elements of the shear piezoelect...
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Login to View More IPC IPC(8): G01P15/09
CPCG01P15/0922
Inventor 郇正利董超马立智
Owner 山东利恩斯智能科技有限公司