High-temperature-resistant dynamic pressure sensor
A dynamic pressure and sensor technology, applied in the measurement of fluid pressure, fluid pressure measurement of elastic deformation gauge, instruments, etc., can solve the problems of high production cost of sensors, complicated lead wire layout process, sensor failure, etc., to solve the problem of fuse failure, Low cost and improved reliability
Pending Publication Date: 2022-02-15
XIAN THERMAL POWER RES INST CO LTD
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Problems solved by technology
However, in actual use, there is often the problem of sensor failure due to high temperature burning of the lead wires; in addition, the lead wire layout process of piezoresistive and piezoelectric dynamic pressure sensors is very complicated, and photolithography technology is required to form lead wire holes. high
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[0024] In order to enable those skilled in the art to better understand the solutions of the present invention, the following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only The embodiments are a part of the present invention, not all embodiments, and are not intended to limit the scope of the present invention. Also, in the following description, descriptions of well-known structures and techniques are omitted to avoid unnecessarily obscuring the concepts disclosed in the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts shall fall within the protection scope of the present invention.
[0025] The schematic diagrams of the structures according to the disclosed embodiments of th...
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Abstract
The invention discloses a high-temperature-resistant dynamic pressure sensor which comprises an eddy current displacement sensor, an upper sealing shell, a vacuum outer wall and a lower sealing shell. The upper sealing shell, the vacuum outer wall and the lower sealing shell are sequentially connected from top to bottom, a through hole is formed in the upper sealing shell, a vacuum heat insulation cavity is formed in the vacuum outer wall, a pressure guide hole is formed in the lower sealing shell, and the through hole is communicated with the vacuum heat insulation cavity; a probe of the eddy current displacement sensor is inserted into the through hole from top to bottom, a heat insulation material layer is arranged between the lower sealing shell and the vacuum outer wall, a metal sensing diaphragm is arranged in the middle of the heat insulation material layer, and the vacuum heat insulation cavity and the pressure guiding hole are separated through the metal sensing diaphragm. The pressure sensor has the characteristics of low cost and high temperature resistance.
Description
technical field [0001] The invention relates to a pressure sensor, in particular to a high temperature resistant dynamic pressure sensor. Background technique [0002] With the development of science and technology and modern industry, pressure measurement requirements under complex conditions such as high temperature, high pressure, and strong turbulence widely exist, especially in the fields of military industry, aerospace, and gas turbine civil power generation. When monitoring the gas pressure in rocket and missile engine combustors, aero engine combustors, and gas turbine combustors, it is often necessary to face a high temperature environment exceeding 1500 ° C. The performance of conventional non-high temperature resistant sensors will seriously deteriorate or even fail, which is far from satisfying pressure measurement. Require. [0003] Currently, there are mainly two types of dynamic pressure sensors used for high temperature measurement: piezoresistive and piezoe...
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Patent Timeline
Login to View More IPC IPC(8): G01L7/08G01B7/16G01B7/02G01L19/06
CPCG01L7/08G01B7/16G01B7/02G01L19/0681
Inventor 李晓丰肖俊峰胡孟起王玮王峰王致程夏林连小龙
Owner XIAN THERMAL POWER RES INST CO LTD