Method for displaying OCT-scanned region of workpiece surface and/or for measuring surface features, and associated OCT system
A technology of workpiece surface and surface features, applied in the field of OCT system, can solve the problem of unknown correct positioning and so on
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[0027] figure 1 The OCT system 1 shown schematically is used to optically scan the surface 2 of the surface 2 of the workpiece 3 and includes a camera 4 for recording an image of the workpiece surface 2 and an optical coherence breakage scanner 5 for optical scanning the surface 2 of the workpiece. . The laser source 6 generates a processing laser beam 7, by means of the laser scanner 8 to the workpiece 3 to two-dimensionally or in the case where the laser scanner 8 has a Z-axis, the processing laser beam 7 is The workpiece surface 2 is deflected.
[0028] The optical coherence break layer scanner 5 has an OCT light source (e.g., ultrafury light-emitting diode) 9 for generating an OCT beam 10 in a known manner, for dividing the OCT beam 10 into a beam 12 and a reference beam 13. The measurement beam 12 guides and impacts to the workpiece surface 2 on the measuring arm 14, and the measurement beam 12 is at least partially reflected and directed back to the beam splitter 11, which ...
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