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Method for displaying OCT-scanned region of workpiece surface and/or for measuring surface features, and associated OCT system

A technology of workpiece surface and surface features, applied in the field of OCT system, can solve the problem of unknown correct positioning and so on

Pending Publication Date: 2022-02-18
TRUMPF LASER GMBH CO KG
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Furthermore, the correct positioning of the optical coherence tomography scanner used to perform the OCT scan relative to the workpiece in the plane of the workpiece surface is generally unknown at the beginning of the scanning process
Determining localization also requires a large number of OCT scans at a large time-consuming

Method used

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  • Method for displaying OCT-scanned region of workpiece surface and/or for measuring surface features, and associated OCT system
  • Method for displaying OCT-scanned region of workpiece surface and/or for measuring surface features, and associated OCT system
  • Method for displaying OCT-scanned region of workpiece surface and/or for measuring surface features, and associated OCT system

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Embodiment Construction

[0027] figure 1 The OCT system 1 shown schematically is used to optically scan the surface 2 of the surface 2 of the workpiece 3 and includes a camera 4 for recording an image of the workpiece surface 2 and an optical coherence breakage scanner 5 for optical scanning the surface 2 of the workpiece. . The laser source 6 generates a processing laser beam 7, by means of the laser scanner 8 to the workpiece 3 to two-dimensionally or in the case where the laser scanner 8 has a Z-axis, the processing laser beam 7 is The workpiece surface 2 is deflected.

[0028] The optical coherence break layer scanner 5 has an OCT light source (e.g., ultrafury light-emitting diode) 9 for generating an OCT beam 10 in a known manner, for dividing the OCT beam 10 into a beam 12 and a reference beam 13. The measurement beam 12 guides and impacts to the workpiece surface 2 on the measuring arm 14, and the measurement beam 12 is at least partially reflected and directed back to the beam splitter 11, which ...

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Abstract

The invention relates to an OCT system (1) comprising an optical coherence tomograph (5) for recording a height profile (28) of a workpiece surface (2) by optical scanning of the workpiece surface (2). According to the invention, the OCT system comprises a camera (4) for capturing an image (23) of the workpiece surface (2) and a display (24) for the joint, in particular superimposed display of the captured image (23) and the recorded height profile (28) of the workpiece surface (2).

Description

Technical field [0001] The present invention relates to a method for displaying an optical scan area and / or a method for measuring surface features, and an OCT system suitable for performing this method. Background technique [0002] The imaging method of the optical coherence breakage scan (Oct: Optical CohenrenceTomograph "is known in the prior art. The three-dimensional image of the workpiece can be recorded in an OCT, in particular using a small field scanner. This image called an OCT scan is recorded in a variety of geometries, especially along the surface of the workpiece (line scan). In order to generate such a meaningful resolution and field of view, a relatively large amount of OCT scan must be performed with a high time of hundreds of milliseconds. The line scan must be arranged on a large area. Further, at the beginning of the scanning process, the correct positioning of the optical coherence break layer scanner for performing an OCT scan is usually unknown relative ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B9/02B23K26/00
CPCG01B9/02091B23K26/22B23K2101/38B23K26/032G01B11/2441G01B11/2518G06T7/50G06T11/003G06T17/30
Inventor K·施米特M·施坦布克
Owner TRUMPF LASER GMBH CO KG