Super-resolution laser direct writing and real-time imaging device and method based on optical tweezers microspheres

Abstract

The invention relates to the field of optical technology, and specifically discloses a super-resolution laser direct writing and real-time imaging method and device based on optical tweezers microspheres, including a laser, a collimated beam expander system, a spatial light modulator, a 4f beam shrinkage system, Chromatic mirror, microscope objective lens, microsphere, direct writing substrate, three-dimensional controllable precision displacement stage, illumination source, illumination module and camera, etc., the output light of the laser is incident on the loaded phase hologram after beam expansion and collimation On the spatial light modulator, the modulated light spot enters the microscopic objective lens through the 4f beam reduction system, and forms a focused spot array on the focal plane of the microscopic objective lens to capture multiple microspheres at the same time, using the strong focusing characteristics of the microspheres to match the change of the phase hologram , to perform high-throughput super-resolution laser direct writing of arbitrary patterns on the direct-writing substrate; at the same time, the microsphere combined with the microscope objective lens can perform real-time imaging of the super-resolution laser direct writing structure, and the image is collected by the camera to realize the microsphere based on optical tweezers. Super-resolution laser direct writing and real-time imaging.

Description

Super-resolution laser direct writing and real-time imaging device and method based on optical tweezers microspheres technical field The present invention relates to optical technology field, be specifically related to a kind of super-resolution laser direct writing and real-time based on optical tweezers microspheres Imaging methods and apparatus. Background technique As one of the mainstream micro-nano processing technologies, laser direct writing technology is widely used in optical masks, optical micro-transparent Manufacturing of mirrors and other devices. With the development of microfabrication technology, on the one hand, laser direct writing technology is required to be capable of sub-200nm Direct-write processing with high resolution, on the other hand, requires real-time in-situ imaging of the entire processing process. Existing Femtoseconds Although laser two-photon processing technology and other technologies have high processing resolution, it is diff...

AI Technical Summary

Problems solved by technology

[0003] The purpose of the present invention is to solve the technical problem that super-resolution direct writing and super-resolution imaging cannot be taken into account in the existing laser direct writing processing technology. The present invention proposes a super-resolution laser direct writing and real-time imaging method and device based on optical tweezers microspheres

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