Micro-displacement measuring device and method based on voltage integral flipping capacitance method
A technology of voltage integration and displacement measurement, which is applied in the field of micro-displacement measurement, can solve the problems of complex design and inaccurate measurement, and achieve the effect of solving the inconvenience of measurement, high measurement accuracy and effective measurement
Pending Publication Date: 2022-03-01
SUZHOU UNIV
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[0006] However, the existing capacitive measurement methods still have the problems of complex design and inaccurate measurement.
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[0041] In order to make the object, technical solution and advantages of the present invention clearer, the specific implementation manners of the present invention will be described in detail below in conjunction with the accompanying drawings. Examples of these preferred embodiments are illustrated in the accompanying drawings. The embodiments of the invention shown in and described with reference to the drawings are merely exemplary, and the invention is not limited to these embodiments.
[0042] Here, it should also be noted that, in order to avoid obscuring the present invention due to unnecessary details, only the structures and / or processing steps closely related to the solution according to the present invention are shown in the drawings, and the related Other details are not relevant to the invention.
[0043] And, in the description of the present invention, the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer" etc. indica...
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The invention discloses a micro-displacement measuring device based on a voltage integral flipping capacitance method. The micro-displacement measuring device comprises a displacement measuring system, an operational amplifier circuit module, a filter circuit module, a micro-control unit, a display and an external power supply, the displacement measurement system comprises two parallel plates, and a micro displacement value is obtained through micro movement between the two parallel plates; the operational amplifier circuit module is used for measuring a micro-displacement value, converting a capacitance change value into a frequency change value and outputting the frequency change value; and the micro-control unit is used for processing the output signal of the filter circuit module, measuring and calculating the corresponding infinitesimal displacement variation when the frequency is changed and displaying the infinitesimal displacement variation. Through the above mode, the method can measure the change of infinitesimal displacement, and compared with other displacement measurement methods, the method has the advantages of smaller linearity error and more accurate data through linear regression analysis.
Description
technical field [0001] The invention relates to the technical field of micro-displacement measurement, in particular to a micro-displacement measurement device and method based on a voltage integral flipping capacitance method. Background technique [0002] In many fields such as engineering, materials, precision instruments, and automatic control, it is often necessary to measure some relatively small displacement scales. Micrometry technology is involved in many cutting-edge science and technology that has attracted much attention, and it plays a decisive role in some cutting-edge technologies. For example, in mechanical engineering applications, it is often necessary to obtain the precise position or small displacement of parts. In the field of mechanical manufacturing technology, the accuracy of parts depends on the accuracy of wire walking, that is, the positioning and motion accuracy of the nozzle. At present, some 3D printing technologies have adopted capacitive displ...
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IPC IPC(8): G01B7/02
CPCG01B7/02
Inventor 吴迪王靖陶智张晓俊郑分刚
Owner SUZHOU UNIV