Light beam stabilizing device based on inertia-free feedback correction

Abstract

The invention discloses a light beam stabilizing device based on inertia-free feedback correction. The device comprises two pairs of light beam deflectors, a first beam splitter prism, a second beam splitter prism, a first lens, a second lens, a first photoelectric sensor, a second photoelectric sensor, a controller and the like. The position and angle of the light beam are controlled through the light beam deflector, mechanical movement in an execution component is completely eliminated and controlled, and interference of environmental noise is eliminated. And the advantage of high response frequency (which can reach more than 1 MHz) of the acousto-optic deflector is utilized, so that rapid and high-precision beam angle drift correction is realized. The stable light beam adjusted by the method and the device can be widely applied to a super-resolution microscopic imaging system and a high-precision laser direct writing photoetching system.

Description

technical field [0001] The invention belongs to the field of ultra-precision optical imaging and writing, and in particular relates to a light beam stabilization device based on inertialess feedback correction. Background technique [0002] With the continuous expansion of the application field of laser equipment and the continuous improvement of requirements, its performance indicators for the light source system are also continuously strengthened. However, due to the influence of its own principle, structure and external environment, it is difficult for the laser itself to avoid the problem of beam drift. In addition to the drift that exists when the light source itself generates the beam, the devices in the subsequent optical path will also affect the stability of the beam transmission due to their own structural characteristics and environmental changes, such as mechanical structural parts being strained by temperature and external forces, airflow in the system cavity, et...

AI Technical Summary

Problems solved by technology

However, with the continuous improvement of the performance index of the precision optical system, the current beam stabilization device still has certain shortcomings, mainly in the performance limitation of the beam stabilization caused by the performance of the actuator itself. The actuator in the current beam stabilization device is mainly a mechanical device Driven fast mirrors, the driving device is usually a voice coil motor driver or a piezoelectric ceramic driver, both of which have a certain inertia in structure and the mirror itself, resulting in a long response time during execution and limited control frequency

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