A Beam Stabilizer Based on No-inertia Feedback Correction

Abstract

The invention discloses a beam stabilization device based on inertialess feedback correction, which comprises two pairs of beam deflectors, a first beam splitting prism, a second beam splitting prism, a first lens, a second lens, a first photoelectric sensor, a second beam splitting prism 2. Photoelectric sensors and controllers and other components. The invention uses the beam deflector to control the position and angle of the beam, completely eliminates the mechanical movement in the control execution part, and eliminates the interference of environmental noise. And it takes advantage of the high response frequency (up to 1 MHz) of the acousto-optic deflector to achieve fast and high-precision beam angle drift correction. The stable light beam adjusted by the method and device of the invention can be widely used in a super-resolution microscopic imaging system and a high-precision laser direct writing photolithography system.

Description

technical field [0001] The invention belongs to the field of ultra-precision optical imaging and writing, and in particular relates to a light beam stabilization device based on inertialess feedback correction. Background technique [0002] With the continuous expansion of the application field of laser equipment and the continuous improvement of requirements, its performance indicators for the light source system are also continuously strengthened. However, due to the influence of its own principle, structure and external environment, it is difficult for the laser itself to avoid the problem of beam drift. In addition to the drift that exists when the light source itself generates the beam, the devices in the subsequent optical path will also affect the stability of the beam transmission due to their own structural characteristics and environmental changes, such as mechanical structural parts being strained by temperature and external forces, airflow in the system cavity, et...

AI Technical Summary

Problems solved by technology

However, with the continuous improvement of the performance index of the precision optical system, the current beam stabilization device still has certain shortcomings, mainly in the performance limitation of the beam stabilization caused by the performance of the actuator itself. The actuator in the current beam stabilization device is mainly a mechanical device Driven fast mirrors, the driving device is usually a voice coil motor driver or a piezoelectric ceramic driver, both of which have a certain inertia in structure and the mirror itself, resulting in a long response time during execution and limited control frequency

Images