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A quartz feeding system and non-destructive adding method for laterally stacking polysilicon raw materials

A feeding system and polysilicon technology, applied in the growth of polycrystalline materials, chemical instruments and methods, single crystal growth, etc., can solve the problems of heavy melting device, time-consuming and laborious, rigid collision of the base, etc., to save manpower and time, The effect of reducing production costs and improving work efficiency

Active Publication Date: 2022-05-27
杭州中欣晶圆半导体股份有限公司 +1
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] Aiming at the deficiencies of the prior art, the present invention provides a quartz feeding system and a non-destructive adding method for laterally stacking polysilicon raw materials, which solves the problem that the existing quartz feeding system needs to manually add a small amount of material, and wait for the quartz to be completely melted before adding. It is time-consuming and labor-intensive, and when manually feeding, quartz particles are easy to spill out to the outside, resulting in a certain degree of waste and loss, and when transporting the entire hot-melt device, it is difficult to achieve light weight due to the heavy weight of the hot-melt device. Handle with care, the base of the hot melt device is prone to rigid collision with the ground, and it is easy to damage the base and the ground

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  • A quartz feeding system and non-destructive adding method for laterally stacking polysilicon raw materials
  • A quartz feeding system and non-destructive adding method for laterally stacking polysilicon raw materials
  • A quartz feeding system and non-destructive adding method for laterally stacking polysilicon raw materials

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Embodiment Construction

[0034] The following will be combined with the accompanying drawings in the embodiments of the present invention, the technical solution in the embodiments of the present invention will be described clearly and completely, it is clear that the embodiments described are only a part of the embodiment of the present invention, not all embodiments. Based on embodiments in the present invention, all other embodiments obtained by those of ordinary skill in the art without making creative work, are within the scope of protection of the present invention.

[0035] See Figure 1-10

[0036] The present invention also discloses a transverse code-placed polysilicon raw material quartz feeding method without lossless addition, comprising the following steps:

[0037] S1, first place the quartz raw materials into the hopper 5, the quartz raw materials through the hopper 5 into the inside of the vertical pipe 4, open the solenoid valve 6, so that a part of the quartz raw materials fall into the j...

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Abstract

The invention discloses a quartz feeding system and a non-destructive adding method for stacking polysilicon raw materials horizontally, comprising a hot melting box, a fixing plate is fixedly connected to the left side of the hot melting box, and a reciprocating feeding mechanism is arranged on the top of the fixing plate; The reciprocating feeding mechanism includes a fixed seat fixedly connected to the top of the fixed plate, the top of the fixed plate is slidably connected with a cross bar, the right end of the cross bar passes through the fixed seat and extends to the outside of the fixed seat, the cross bar The outer surface of the cross bar is slidingly connected with the inner surface of the fixed seat, and the left side of the top of the cross bar is fixedly connected with a fixed column. The invention relates to the technical field of quartz feeding. The quartz feeding system and non-destructive adding method for stacking polysilicon raw materials horizontally realizes the timing free falling of quartz raw materials through the setting of the switch mechanism. The loss of raw materials is reduced, and the production cost is reduced.

Description

Technical field [0001] The present invention relates to the field of quartz feeding technology, specifically a transverse code placement polycrystalline silicon raw material quartz feeding system and non-destructive addition method. Background [0002] Polysilicon is a form of elemental silicon. When the molten elemental silicon solidifies under supercooled conditions, the silicon atoms are arranged into many crystal nuclei in the form of diamond lattice, if these crystal nuclei grow into grains with different crystal plane orientations, these grains combine to crystallize into polycrystalline silicon. Polycrystalline silicon material is the direct raw material for the production of monocrystalline silicon, and is the electronic information basic material of contemporary artificial intelligence, automatic control, information processing, photoelectric conversion and other semiconductor devices. It has been called "the cornerstone of the microelectronics building". [0003] Polycr...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C30B15/02C30B29/06
CPCC30B15/02C30B29/06
Inventor 马吟霜芮阳刘洁魏兴彤
Owner 杭州中欣晶圆半导体股份有限公司
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