Aberration-free laser scanning method and system

Abstract

The invention discloses an aberration-free laser scanning method and system, and belongs to the field of optics. Comprising the steps that in the preprocessing stage, a scanning track is sliced into N concentric circular tracks, and N is a positive integer; any point on each circular track is taken as a scanning starting point; aberration correction data corresponding to each scanning starting point is obtained; the scanning stage comprises the following steps: S1, generating a laser beam; s2, selecting an unscanned circular track as a to-be-scanned circular track, controlling a deflection angle of a laser beam to enable the laser beam to be focused on a scanning starting point of the to-be-scanned circular track, setting aberration correction data corresponding to the scanning starting point, enabling the laser beam to rotate for one circle along the circular track from the scanning starting point, and in the scanning process, enabling the laser beam to rotate for one circle along the circular track; the light beam rotation angular velocity is consistent with the annular scanning angular velocity; and S3, repeating the step S3 until all the N circular trajectories are scanned. On the basis of shortening aberration correction time, high-speed large-range aberration-free scanning is realized.

Description

technical field [0001] The invention belongs to the field of optics, and more specifically relates to a laser scanning method and system without aberration. Background technique [0002] In an optical system, there will inevitably be aberrations. The existence of aberrations will degrade the optical performance parameters of the system, for example, the radius of the beam waist of the focused spot will increase, and the energy density will decrease. In some fields, such as laser eye surgery and laser processing, this situation often leads to a decrease in the processing accuracy, an increase in the power of the injected laser, and the like. Especially in the scanning system, the magnitude and direction of the aberrations are not the same at different scanning positions, which makes the processing accuracy of different positions on the processing surface different and the processing quality deteriorates. [0003] At present, there are mainly two methods to solve the aberrati...

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Problems solved by technology

However, it is very complicated and cumbersome to do so, and it takes a lot of time. In the case of high-speed and large-scale scanning, the update speed requirements for aberration compensation devices are very high, and existing devices cannot meet the requirements.

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