Vibrating gyroscope precision assembling and adjusting equipment based on photoelectric combination

Abstract

The invention provides a photoelectric composite-based vibratory gyroscope precision adjustment device, which comprises two multi-degree-of-freedom high-precision displacement tables which are oppositely arranged and are respectively used for installing a quartz base and a hemispherical harmonic oscillator; the laser detection device is used for detecting contour features of the quartz base and the hemispherical harmonic oscillator; the capacitance detection device is used for detecting capacitance values of N electrode pairs between the quartz base and the hemispherical harmonic oscillator; the industrial personal computer is in communication connection with the laser detection device, the capacitance detection device and the multi-degree-of-freedom high-precision displacement table; in the coarse adjustment stage, the industrial personal computer adjusts the multi-degree-of-freedom high-precision displacement table according to the contour features of the quartz base and the hemispherical harmonic oscillator; and in the fine adjustment stage, the industrial personal computer adjusts the multi-degree-of-freedom high-precision displacement table according to the capacitance value of each electrode pair. According to the invention, based on laser and capacitance detection, the problem of submicron precision assembly of a quartz hemispherical resonator gyroscope with a two-set structure is solved.

Description

technical field [0001] The invention relates to the technical field of precision assembly mechanical equipment for hemispherical gyroscopes, in particular to a precision assembly and adjustment equipment for vibrating gyroscopes based on photoelectric composite. Background technique [0002] The hemispherical resonant gyroscope is a solid vibration gyroscope, and its general structure can be divided into three sets of structures and two sets of structures. The main structure of the three-set structure hemispherical resonant gyro is composed of an excitation cover, a hemispherical resonator, and a detection base. The two-set structure is based on the three-set structure, and the excitation cover and the detection base are designed as an integrated structure. In both structural forms, the hemispherical resonator is the core sensitive element. In addition to the processing accuracy of the main parts, the assembly accuracy along the circumferential and axial directions of the he...

AI Technical Summary

Problems solved by technology

[0003] The assembly requirement of the hemispherical resonant gyroscope is to make the centroid and the center of mass of the main parts multi-centered. Since the main part of the hemispherical resonant gyroscope is made of transparent quartz material, and the structure of the main part contains spherical geometric features, these characteristics make the hemispherical resonant gyroscope The real-time detection and control of sub-micron assembly dimensions of gyroscopes in the assembly process encounters great challenges

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