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Vacuum processing device

A technology of vacuum processing device and vacuum chamber, which is used in transportation and packaging, electrical components, semiconductor/solid-state device manufacturing, etc.

Pending Publication Date: 2022-03-18
DAINIPPON SCREEN MTG CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] When the stage on which the substrate is placed is moved in the vacuum chamber, it is affected by the deformation of the vacuum chamber or the heat generated by the movement, and the movement of the stage may cause problems.

Method used

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  • Vacuum processing device
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Embodiment Construction

[0057] Embodiments will be described below with reference to the drawings. In the following embodiments, detailed features and the like are shown for explaining technology, but these are merely examples, and not all of these features are necessarily essential to make the embodiments possible.

[0058] In addition, the drawings are diagrams schematically shown, and for convenience of description, omission of structures or simplification of structures are appropriately performed in the drawings. In addition, the mutual relationship of the size and position of the structure etc. which are shown in a different drawing is not necessarily described accurately, and can be changed suitably. In addition, in drawings such as plan views that are not cross-sectional views, hatching may be added in order to make the content of the embodiment easier to understand.

[0059] In addition, in the following description, the same structural member is attached|subjected and shown the same code|sy...

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Abstract

The present invention provides a vacuum processing apparatus capable of appropriately moving a stage in a vacuum chamber. The vacuum processing apparatus includes: a vacuum chamber; the objective table is arranged in the vacuum chamber; an external fixing part connected to the vacuum chamber via an elastic member; and a moving mechanism that is fixed to the external fixing part, is provided in the vacuum chamber, and moves the stage, the moving mechanism having: a coil module that is fixed to the external fixing part, and generates a magnetic force; and a magnet module connected to the stage and configured to move relative to the coil module by a magnetic force generated by the coil module.

Description

technical field [0001] The technology disclosed in the specification of this application relates to a vacuum processing device. Substrates to be processed include, for example, substrates for flat panel displays (FPD) such as semiconductor wafers, glass substrates for liquid crystal display devices, organic EL (electro luminescence: electroluminescence) display devices, substrates for optical disks, substrates for magnetic disks, A substrate for a magneto-optical disk, a glass substrate for a photomask, a ceramic substrate, a substrate for a field emission display (ie, FED), a substrate for a solar cell, and the like. Background technique [0002] Conventionally, a vacuum processing apparatus is used that performs various processes on a processing object such as a substrate placed on a stage movable in a vacuum chamber. [0003] Patent Document 1: Japanese Patent Laid-Open No. 2015-230926 [0004] Patent Document 2: Japanese Patent Laid-Open No. 2001-44107 [0005] When t...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/677H01L21/683
CPCH01L21/67709H01L21/67742H01L21/683H01L21/68764H01L21/67259
Inventor 水野博喜中原雅尚
Owner DAINIPPON SCREEN MTG CO LTD
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