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Vacuum opening/closing valve

A vacuum and vacuum pump technology, applied in the field of vacuum on/off valves, can solve the problems of corrugated seal damage, wear, large cracks, etc., and achieve the effect of preventing friction

Active Publication Date: 2010-06-23
CKD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0021] (2) Secondly, since the base cloth of the corrugated seal 150 is formed as Figure 14 The plain weave texture shown in , so the corrugated seal 150 has less flexibility, making it difficult to bend freely
This may cause the crack created in the top (fold) 158 to grow larger over time so that it reaches the pleats 159, thereby wearing down or destroying the base fabric of the bellows seal 150
[0022] Due to the problems mentioned in (1) and (2), there is a possibility that the gas supplied into the air chamber AS will leak through the bellows seal 150, and the valve opening degree of the vacuum on / off valve 100 cannot be controlled.
As a result, the bellows seal 150 must be replaced frequently and a more durable vacuum on / off valve is required

Method used

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Examples

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Embodiment Construction

[0066] A detailed description will now be given of a preferred embodiment of a vacuum on / off valve embodying the present invention with reference to the accompanying drawings. Figure 10 is an explanatory diagram showing the configuration of the vacuum pressure control system 1 including the vacuum on / off valve 10 .

[0067] The vacuum pressure control system 1 is a system for performing surface treatment on a wafer 8 by alternately filling or exhausting a process gas and a purge gas into a vacuum chamber 2 in which the wafer 8 is placed in a semiconductor manufacturing process. Such as Figure 10 As shown in , the vacuum pressure control system 1 mainly includes a vacuum chamber 2 (vacuum container), a vacuum pump 5, an air supply source 6 for supplying driving air AR, a vacuum on / off valve 10, and a vacuum on / off valve 10 for controlling the vacuum. A feeding valve (not shown) with a certain opening degree, and a vacuum pressure controller 7 electrically connected to a vacu...

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PUM

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Abstract

A durable vacuum opening / closing valve connectable with a vacuum chamber and a vacuum pump is arranged to control vacuum pressure in the vacuum chamber by changing an opening degree of an O ring serving as a valve element relative to a valve seat. A predetermined clearance between an outer peripheral surface of a piston and an inner peripheral surface of a cylinder is sealed by a bellofram which changes its shape in association with movement of the piston moved to open or close the valve. The bellofram includes an inclined surface with a predetermined inclination angle and the outer peripheryof the piston includes an inclined surface with a predetermined inclination angle, so that an inner diameter of the bellofram in contact with the piston and the outer diameter of the piston are equalwhen the valve element is in contact with the valve seat.

Description

technical field [0001] The present invention relates to a vacuum on / off valve. Specifically, the vacuum on / off valve can be connected between the vacuum container and the vacuum pump, and is used to control the vacuum pressure of the gas in the vacuum container by changing the opening degree of the valve. Background technique [0002] Hitherto, for example, in semiconductor manufacturing processes, such a vacuum pressure control system has been proposed which alternately fills and discharges process gas and purge gas in a vacuum chamber in which a wafer is placed. In this vacuum pressure control system, a vacuum on / off valve is arranged to be connectable between the vacuum chamber and the vacuum pump. The vacuum on / off valve is provided to control the vacuum pressure of the process gas to be supplied into the vacuum chamber by changing the opening degree of the hollow on / off valve (see Japanese Unexamined Patent Publication No. 09(1997)-072458). [0003] Traditional vacuum...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): F16K41/10F16K1/48F16K31/122F16K27/02F16K51/02
CPCF16K31/122F16K51/02H01L21/02
Inventor 渡边雅之宫原诚梅泽俊祐
Owner CKD
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