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Static performance testing device suitable for multi-size static pressure air bearing

A test device and static performance technology, which is applied in the direction of mechanical bearing test, measuring device, and the use of stable tension/pressure test material strength, etc., can solve the problem of inability to adjust the angle of the decoupling ball, the loading deviation of the tested part, and the inability to achieve static Pressure air bearing static performance test and other issues, to achieve superior output continuity and precise control degree, to ensure the effect of accuracy

Pending Publication Date: 2022-04-01
HARBIN INST OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] In order to solve the problem that the static and dynamic performance test device of the existing static pressure air bearing cannot adjust the angle of the decoupling ball according to the actual working conditions, the static performance test of the static pressure air bearing under complex working conditions cannot be realized, and the tested parts There is a certain deviation problem when loading, and then a static performance test device suitable for multi-size static pressure air bearings is provided;

Method used

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  • Static performance testing device suitable for multi-size static pressure air bearing
  • Static performance testing device suitable for multi-size static pressure air bearing
  • Static performance testing device suitable for multi-size static pressure air bearing

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specific Embodiment approach 1

[0032] Specific implementation mode one: refer to Figure 1 to Figure 6 This embodiment is described. This embodiment provides a static performance test device suitable for multi-size static pressure air bearings. The test device includes a marble vibration isolation platform 1, four height-adjustable legs 2, a support platform 3, Loading module, working condition regulation module and air bearing module 10;

[0033]The center of the marble vibration isolation platform 1 is processed with a groove, the air-floating support module 10 is arranged in the groove at the center of the marble vibration isolation platform 1, and the four height-adjustable feet 2 are arranged vertically on the marble isolation platform 1. The upper surface of the vibration platform 1, and the fixed end of each height-adjustable leg 2 is fixedly connected with the upper surface of the marble vibration isolation platform 1, and the support platform 3 is set on the adjustment ends of the four height-adjus...

specific Embodiment approach 2

[0035] Specific implementation mode two: refer to figure 1 and Figure 6 This embodiment will be described. This embodiment is to further limit the air-floating support module 10 described in Embodiment 1. In this embodiment, the air-floating support module 10 is an air-floating supporting marble. Other compositions and connection methods are the same as those in Embodiment 1.

[0036] In this embodiment, the vibration damping property of the marble itself is used as the supporting plane during the measurement, which can effectively absorb the vibration amplitude generated by the loading module during the loading of the measured component during the measurement, and effectively protect the measured component.

specific Embodiment approach 3

[0037] Specific implementation mode three: refer to Figure 1 to Figure 6 Describe this embodiment. This embodiment is to further limit the loading module described in Embodiment 1. In this embodiment, the loading module includes an electric cylinder 4, a support frame 5 and a force sensor 6. The support frame 5 It is arranged on the upper surface of the support platform 3, and the support frame 5 is disassembled and connected with the support platform 3, the electric cylinder 4 is placed upside down in the support frame 5, the housing in the electric cylinder 4 is fixedly connected with the inner top of the support frame 5, and the electric cylinder The end of the piston rod in 4 passes through the bottom of the support frame 5 and the installation hole on the support platform 3 in sequence and is fixedly connected with the force sensor 6 arranged below the support platform 3 . Other compositions and connection methods are the same as those in Embodiment 1.

[0038] In this ...

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Abstract

The invention discloses a static performance testing device suitable for multi-size static pressure air bearings, belongs to the technical field of precise instruments and machinery, and aims to solve the problems that an existing static and dynamic performance testing device for the static pressure air bearings cannot adjust the angle of a decoupling ball according to actual working conditions, and static performance testing of the static pressure air bearings under complex working conditions cannot be achieved. The static performance testing device suitable for the multi-size static pressure air bearing provided by the invention has the advantages that the independent air floating bearing module cuts off a force transmission path between air floating and a main body structure through the independent air floating bearing module and the working condition adjusting module, so that the working condition adjusting module can adjust the working condition of the air floating bearing, and the working condition adjusting module can adjust the working condition of the air floating bearing; the accuracy of the bearing capacity test is ensured, and the working condition adjusting module can more accurately realize the static performance test of the static pressure air bearing and the motion decoupling connection structure thereof.

Description

technical field [0001] The invention belongs to the technical field of precision instruments and machinery, and in particular relates to a static performance testing device suitable for multi-size static pressure air bearings. Background technique [0002] Due to its advantages of wide speed range, high motion precision, low friction, clean and environmentally friendly, long life and easy processing, static pressure air bearings are widely used in ultra-precision motion tables of lithography machines, ultra-precision measuring instruments and ultra-precision CNC Machine tools and other fields. However, limited by the working principle of the static pressure air bearing, in the assembly of various ultra-precision motion platforms, it is necessary to improve the assembly accuracy of the static pressure air bearing connection assembly as much as possible, reduce the assembly error, and at the same time It is necessary to design a static pressure air bearing motion decoupling c...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01M13/04G01N3/08G01N3/02
Inventor 吴剑威郑健王继尧赵鹏越王辉
Owner HARBIN INST OF TECH
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