Chip ultralow-temperature cooling device and chip testing system

Abstract

The invention discloses a chip ultra-low temperature cooling device and a chip testing system, and relates to the technical field of chip testing, the chip ultra-low temperature cooling device comprises a liquid nitrogen pump which is configured to be started according to a control instruction of a control module so as to inject liquid nitrogen of a liquid nitrogen tank into a first Dewar through a first liquid conveying pipe; one end of the first infusion tube is arranged at an outlet of the liquid nitrogen pump, and the other end extends into the first Dewar; the first Dewar is communicated with the second Dewar through a second infusion tube; the second Dewar is not sealed and is communicated with the first Dewar through a second liquid conveying pipe, and a chip bearing table is arranged in the second Dewar and is used for bearing a chip to be tested; and the control module is configured to send a control instruction to the liquid nitrogen pump according to user requirements or based on the received temperature signal or liquid level signal, so as to control the start and stop of the liquid nitrogen pump. According to the chip testing system, automatic filling of liquid nitrogen and almost constant liquid level height in the chip testing process can be achieved, and the accuracy of chip testing data is guaranteed.

Description

technical field [0001] The invention relates to the technical field of chip testing, in particular to a chip ultra-low temperature cooling device and a chip testing system. Background technique [0002] During the chip testing process, it is necessary to provide a controlled test environment for the device under test, and realize the testing of the electrical performance parameters of the chip through the physical contact between the probe tip and the chip pad. The test process requirement that the chip is immersed in the liquid nitrogen fluid determines that the liquid nitrogen container has an open structure. When performing a chip test, the chip to be tested is placed on the wafer holder set in the liquid nitrogen container. The liquid nitrogen will inevitably continue to be vaporized due to the influence of heat, and the liquid level will continue to drop. According to the process requirements, it is necessary to manually monitor the liquid level in real time. Check the...

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Problems solved by technology

[0004] The purpose of the present invention is to provide a chip ultra-low temperature cooling device to solve the technical problems of large liquid level error and low safety in the chip ultra-low temperature cooling device in the prior art relying on manual filling of liquid nitrogen, and to realize chip testing. Liquid nitrogen automatic filling and almost constant liquid level ensure the accuracy of chip test data

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