Phase shift profilometry based on multi-angle sine stripe light field fusion
A sine fringe, multi-angle technology, applied in the field of 3D optical detection, can solve the problems of too bright or too dark images, insufficient information, and easy to produce detection dead ends.
Pending Publication Date: 2022-05-10
嘉兴市像景智能装备有限公司
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[0004] In the actual field of industrial 3D inspection, due to different incident angles of light and reflectivity of different surfaces, the image is locally too bright or too dark, and problems such as shadow occlusion between detection targets are prone to detection dead ends and wrong data. Based on monocular vision The information obtained by the light field under the light field is not comprehensive enough, which may cause a large measurement error
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[0062] The specific embodiment of the present invention will be further described below in conjunction with the accompanying drawings, in order to describe the technical solution of the present invention in detail, the main process is shown in the appendix figure 1 .
[0063] S 1 1. A sinusoidal fringe light field projection and shooting device provided by the present invention is similar to the attached figure 2 As shown: specifically, the projection mechanism is used to project 20 or more sets of sinusoidal stripes onto the surface of the measured object. After the light is reflected, it passes through a microlens array 211 and is collected by the area array camera 210. At this time, the camera not only collects the light of each light Strong information, and also collects the angle information of each ray, and obtains multiple sub-aperture fringe light images with different angles. Based on the biplane model, the four-dimensional light field is parameterized, and a four-d...
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The three-dimensional measurement based on the light field becomes one of the mainstream technologies of industrial three-dimensional detection due to better precision, speed and detection range, and the detection precision can be effectively improved by combining the three-dimensional measurement with the sine fringe phase displacement profilometry. The invention provides a phase shift profilometry based on multi-angle sine fringe light field fusion, which comprises the following steps: firstly, collecting one or more groups of sine phase shift fringes based on a light field imaging system of a microlens array, calculating the absolute phase of each sub-aperture image after image calibration, selecting fused sub-apertures based on phase contribution weight, and calculating the phase of the fused sub-apertures; the method comprises the steps that firstly, point cloud data are obtained, then fusion phases of angles, distances and similarities are combined, the phases are mapped to the height and then are filled into the point cloud data through correction, finally the point cloud data are filled into a point cloud matrix through multi-angle point cloud fusion, and further, micro-transparent array calibration calibration, camera calibration and phase-height mapping calibration methods corresponding to the point cloud data are provided.
Description
technical field [0001] The invention relates to the technical field of three-dimensional optical detection, in particular to a phase-shift profilometry based on the fusion of multi-angle sinusoidal fringe light fields, which can perform high-speed and high-precision three-dimensional detection for very small objects on diffuse reflection surfaces. Background technique [0002] For better quality process control in industrial production, optical inspection systems are a critical part of many manufacturing and quality control processes. Leading-edge manufacturing currently places challenging requirements on optical inspection systems, namely high throughput and detection of small defects, adaptability to complex inspection surfaces, and accurate 3D height measurement of moving objects. Light field three-dimensional measurement has become one of the mainstream solutions for industrial three-dimensional inspection due to its micron-level high-precision measurement, millimeter-le...
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Login to View More IPC IPC(8): G01B11/25G06T7/80
CPCG01B11/254G01B11/2504G01B11/002G06T7/80G06T2207/10028
Inventor 徐亦新
Owner 嘉兴市像景智能装备有限公司