Gas generator and generation method
A gas generator and generator technology, applied in chemical instruments and methods, gas and gas/vapor mixing, fluid mixers, etc., can solve the problems of inaccurate gas distribution concentration and dynamic gas distribution method, and avoid gas distribution The effect of inaccurate concentration and improved accuracy
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[0037] The specific implementation manners of the present invention will be described in detail below in conjunction with the drawings and examples.
[0038] figure 1 It is a schematic diagram of the overall structure of the gas generator of the present invention, mainly including a generator shell 1, which is provided with a generator air inlet 2 and a generator gas outlet 3, and the generator shell 1 includes a reaction device 4, an air inlet The device 5 and the liquid delivery device 6, the present invention uses liquid as a precursor, the liquid is contained in a container, the liquid is connected to the liquid delivery device 6 through a liquid delivery tube, and the liquid delivery device 6 is connected to the reaction device 4 through a capillary tube 464, The gas inlet device 5 is connected to the gas mass flow controller 51 through the gas delivery pipe 52 , and the gas mass flow controller 51 is connected to the reaction device 4 through the gas delivery pipe 52 . ...
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