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Horizontal exhaust equipment

An exhaust equipment, horizontal technology, applied in the field of horizontal exhaust equipment, can solve the problems of low efficiency, slow heat conduction, long cooling time, etc., to achieve the effect of improving uniformity, improving work efficiency, and improving the effect of cooling

Pending Publication Date: 2022-05-13
山东微波电真空技术有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, at present, most of them adopt the method of natural cooling for cooling, and the inside of the oven has a certain degree of vacuum, and the heat conduction is slow, resulting in long cooling time and low efficiency.

Method used

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Embodiment Construction

[0022] In order to explain the overall concept of the present application more clearly, the following will be described in detail by way of examples in combination with the accompanying drawings.

[0023] It should be noted that many specific details are set forth in the following description so as to fully understand the present application, but the present application can also be implemented in other ways different from those described here, therefore, the protection scope of the present application is not limited by the following limitations of the specific embodiments disclosed.

[0024] In addition, in the description of the present application, it should be understood that the terms "center", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal" ", "Top", "Bottom", "Inner", "Outer", "Axial", "Radial", "Circumferential" and other indicated orientations or positional relationships are based on the orientations or positional relationships shown in the...

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PUM

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Abstract

The invention relates to the technical field of vacuum exhaust, in particular to horizontal exhaust equipment which comprises a drying oven, an inner vacuum assembly, an outer vacuum assembly, a nitrogen supply part and a nitrogen circulation assembly. The oven forms a vacuum chamber, the vacuum chamber can be opened or closed, the oven comprises an outer shell and an inner shell, the inner shell is provided with a heating structure, a heat insulation gap is formed between the outer shell and the inner shell, and air holes are formed in the inner shell; the inner vacuum assembly is provided with an inner vacuum extraction opening; the outer vacuum assembly is provided with an outer vacuum extraction opening; the nitrogen supply part is connected with the vacuum chamber and used for supplying nitrogen to the vacuum chamber; the nitrogen circulation assembly is arranged at the corresponding air hole of the heat insulation gap, and nitrogen between the outer shell and the inner shell can flow in the air hole. According to the horizontal exhaust equipment, the cooling time can be shortened, and the working efficiency is improved.

Description

technical field [0001] The present application relates to the technical field of vacuum exhaust, in particular to a horizontal exhaust equipment. Background technique [0002] Existing exhaust equipment usually includes an oven, vacuum components, etc. The oven forms a vacuum chamber, and vacuum devices such as traveling wave tubes can be placed in the vacuum chamber. After closing the vacuum chamber, the vacuum assembly is pumped down to exhaust the traveling wave tube. During the exhaust process, the oven needs to be heated to improve the exhaust effect. Moreover, after the exhaust is completed, the oven needs to be cooled in a closed state to prevent the traveling wave tube from being oxidized. However, at present, natural cooling is mostly used for cooling, and the inside of the oven has a certain degree of vacuum, and the heat conduction is slow, resulting in long cooling time and low efficiency. Contents of the invention [0003] In order to solve the above technic...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F04B37/14F04B37/18F04B41/06F26B5/04F26B25/00
CPCF04B37/14F04B37/18F04B41/06F26B5/04F26B25/00
Inventor 赵建东肖新来苏鹏徐鹏杨翔宇肖刘张毅张志强
Owner 山东微波电真空技术有限公司