Single crystal or polycrystalline silicon material stacked bar material integral transfer water explosion device and use method thereof

Abstract

The invention discloses a single crystal or polycrystalline silicon material stacked bar material integral transfer water explosion device and a use method thereof, the device comprises a water explosion tank for accommodating a silicon material bar material, the water explosion tank is of a rectangular structure, and the bottom surface of the water explosion tank is of a sealed structure with the periphery extending upwards from the bottom surface; the first device part is used for heating and transferring silicon bars; the second device part is used for heating and transferring silicon bars, is positioned on the other side of the water blasting tank, extends in the length direction of the other side of the water blasting tank, and is provided with a second input end and a second output end; the second input end of the second device part faces the water explosion tank and is in butt joint with the opening of the water explosion tank, and the second output end of the second device part is far away from the water explosion tank; the first device part, the water blasting groove and the second device part are sequentially arranged on the same horizontal line, and a silicon bar enters from the first input end of the first device part, passes through the water blasting groove and is discharged from the second output end of the second device part.

Description

technical field [0001] The invention relates to the technical field of silicon material processing, in particular to a single crystal or polycrystalline silicon material stacking rod integral transfer water explosion device and a use method thereof. Background technique [0002] Silicon is the most abundant element semiconductor on the earth's crust. It has superior properties and relatively mature technology. It has become the main raw material of solid-state electronic devices. Silicon material is an important semiconductor material. The symbol of the chemical element is Si. Silicon used in the electronics industry should have high purity and excellent electrical and mechanical properties. Silicon is the semiconductor material with the largest output and widest application. Its output and usage mark With the level of a country's electronics industry, in order to meet the needs of VLSI, the preparation technology of silicon single crystal with high integrity and high unifor...

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Problems solved by technology

[0003] In the prior art, the processing direction of the silicon material is the crushing technology, that is, the silicon material is crushed by a crusher, and the silicon material is naturally broken or easily broken by heat treatment. Generally, the silicon material is heated by a heat source, but now Some processing devices are not mature and integrated, and do not meet the requirements of automatic and continuous processes, and are prone to material jams and dropouts during the process, resulting in poor yields. For this reason, we propose a monocrystalline or polycrystalline silicon Water explosion device for overall transfer of material accumulation bar and its application method

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