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One-way injection locking semiconductor laser based on heterogeneous integration

An injection locking and laser technology, which is applied to semiconductor lasers, lasers, laser components, etc., can solve the problems of large volume and complex integration of injection locking lasers

Pending Publication Date: 2022-05-27
THE 44TH INST OF CHINA ELECTRONICS TECH GROUP CORP
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] In view of this, the object of the present invention is to provide a unidirectional injection-locked semiconductor laser based on heterogeneous integration, which is used to solve the problems of large volume and complex integration of injection-locked lasers in the prior art

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  • One-way injection locking semiconductor laser based on heterogeneous integration
  • One-way injection locking semiconductor laser based on heterogeneous integration
  • One-way injection locking semiconductor laser based on heterogeneous integration

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Embodiment Construction

[0028] The embodiments of the present invention are described below through specific specific examples. The drawings provided in the following embodiments are only to illustrate the basic idea of ​​the present invention in a schematic way. If there is no conflict, the following embodiments and the features in the embodiments can be combined with each other.

[0029] like figure 1 and figure 2 As shown, a preferred embodiment of the unidirectional injection-locked semiconductor laser based on heterogeneous integration of the present invention includes a silicon-based micro-ring chip 1, which is a low-loss waveguide at wavelengths of 1310 nm and 1550 nm, so The material of the silicon-based microring chip 1 is silicon-on-insulator (SOI, Silicon-on-insulator) or Si 3 N 4 , preferably using SOI, the SOI includes SiO 2 Substrate and Si layer. The silicon-based micro-ring chip 1 is provided with a through-silicon waveguide 13 and a micro-ring 15 , and the through-silicon waveg...

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Abstract

The invention relates to a one-way injection locking semiconductor laser based on heterogeneous integration, which comprises a silicon-based micro-ring chip, a straight-through silicon waveguide and a micro-ring are arranged on the silicon-based micro-ring chip, and a master laser chip and a slave laser chip are respectively bonded on the silicon-based micro-ring chip at positions corresponding to two ends of the straight-through silicon waveguide. Two ends of the straight-through silicon waveguide are respectively coupled with the master laser chip and the slave laser chip; the micro-ring is located on one side of the straight-through silicon waveguide, a magneto-optical chip is bonded above the micro-ring, and the magneto-optical chip is used for generating a magnetic field when powered on to enable the micro-ring to have a nonreciprocal phase shift characteristic. In the invention, the non-reciprocal phase shift characteristic of the micro-ring structure under the action of the electromagnetic field is utilized to realize the optical isolation function between the master laser and the slave laser, the heterogeneous integrated single-chip unidirectional optical injection locking laser is realized, and the problems of difficult coupling, low efficiency, high packaging cost, large size and the like of the existing unidirectional injection locking laser are solved.

Description

technical field [0001] The invention belongs to the technical field of semiconductor lasers, and relates to a unidirectional injection locking semiconductor laser based on heterogeneous integration. Background technique [0002] Injection-locked semiconductor lasers utilize the injection-locking effect of master-slave lasers to narrow the spectral width of the terminal laser, improve frequency stability, and improve frequency response characteristics. There are important applications in many fields. [0003] Injection locking usually has two cases, one is external cavity injection (self-injection), and the other is master-slave injection. For master-slave injection locking, the slave laser is locked to the frequency of the master laser, which is a unidirectional injection. Optical isolators are required between the master and slave lasers to avoid mutual injection of master and slave lasers. This is particularly important in quantum optical communication, which can ensure...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01S5/065H01S5/026
CPCH01S5/0657H01S5/026
Inventor 冯琛廖苗苗周帅刘尚军段利华张靖
Owner THE 44TH INST OF CHINA ELECTRONICS TECH GROUP CORP
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