Thermal insulation plate based on MOCVD equipment heater

Abstract

The invention belongs to the field of MOCVD (Metal Organic Chemical Vapor Deposition) equipment manufacturing, and provides a thermal insulation plate based on an MOCVD equipment heater, which comprises a slide glass disc, a heater arranged on the lower side of the slide glass disc and a thermal insulation layer arranged at the bottom of the heater, and a thermal insulation plate mechanism is arranged between the bottom of the heater and the thermal insulation layer; a heater electrode is arranged at the bottom of the heater and penetrates through the heat insulation layer and the heat insulation plate mechanism; the heat insulation plate mechanism is formed by splicing a plurality of heat insulation plates in different shapes. A heat insulation plate mechanism is additionally arranged above a heat insulation layer of an original machine table, precise control over a temperature field by the growth technology is facilitated, the product yield is greatly improved, the problems of upwarp deformation of the heat insulation layer after high-temperature baking and abnormal ignition and discharge of a heater support are solved, the heat insulation layer is protected by the heat insulation plate mechanism, and the service life is prolonged.

Description

technical field [0001] The invention relates to the field of MOCVD equipment manufacturing, in particular to a heat shield based on a MOCVD equipment heater. Background technique [0002] The design of the heating system is the core technology of the MOCVD equipment. Whether the temperature can be controlled uniformly and accurately directly determines the quality of the wafer growth. The competition of domestic LED epitaxy plants is becoming more and more fierce, and the temperature requirements of the wafer fabs during the wafer growth process are also getting higher and higher. [0003] The heater insulation layer is located at the lower part of the heater, with a total of three layers. It is made of high-temperature resistant metal molybdenum. Its main function is to radiate heat upwards and thermally protect the cavity base. The heat insulation layer is provided with electrode holes at the heater electrodes, and the Heater purge gas is the heater protective gas. During...

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Problems solved by technology

[0006] In this technology, there is only a groove in the middle, which is only satisfied with the temperature adjustment in the middle area, while the graphite disk is in a rotating state when in use, so the growth temperature should be in a ring shape. The improvement in this technology, Unable to meet the temperature adjustment of each area on the graphite disk

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