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Capacitive six-dimensional force sensor

A six-dimensional force sensor and capacitive technology, applied in the field of sensors, can solve the problems of limited use, large size, and complex structure of capacitive six-dimensional force sensors, so as to reduce the volume, reduce the radial occupied space, and expand the The effect of the scope of application

Pending Publication Date: 2022-06-24
GUANGXI UNIV
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  • Application Information

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Problems solved by technology

However, in the related art, the capacitive six-dimensional force sensor usually needs at least six capacitors for detection, the structure is complex, and the volume is too large, which limits the use of the capacitive six-dimensional force sensor

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  • Capacitive six-dimensional force sensor
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  • Capacitive six-dimensional force sensor

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Embodiment Construction

[0045] The following describes in detail the embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein the same or similar reference numerals refer to the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and should not be construed as a limitation of the present invention.

[0046] In the description of the present invention, it should be understood that the azimuth description, such as the azimuth or position relationship indicated by up, down, front, rear, left, right, etc., is based on the azimuth or position relationship shown in the drawings, only In order to facilitate the description of the present invention and simplify the description, it is not indicated or implied that the indicated device or element must have a particular orientation, be c...

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Abstract

The invention discloses a capacitive six-dimensional force sensor. The device comprises a main body, a PCB (Printed Circuit Board), a plurality of flat movable polar plates and a first vertical static polar plate. The main body comprises a base, a deformation beam and a stress piece, the deformation beam comprises a plurality of inner beams, one end of each inner beam is connected to the base, and the other end of each inner beam is connected to the stress piece; each flat moving plate is connected to the stress piece and extends towards the base; the PCB is connected to the base, a first parallel static pole plate is arranged at the position, corresponding to the flat moving pole plate, of the PCB, and a gap is formed between the first parallel static pole plate and the flat moving pole plate; the first vertical static pole plates are connected to the base, and gaps are formed between the first vertical static pole plates and the side face of the inner beam. The first vertical static pole plate and the inner beam of the deformation beam form a vertically-arranged parallel pole plate capacitor, an additional movable pole plate does not need to be arranged, and the sensor structure is fully utilized. And the first vertical static pole plate is vertically arranged, and the axial space of the capacitive six-dimensional force sensor is fully utilized, so that the capacitive six-dimensional force sensor is more compact.

Description

technical field [0001] The invention relates to the technical field of sensors, in particular to a capacitive six-dimensional force sensor Background technique [0002] The six-dimensional force sensor can detect the three-dimensional orthogonal force and three-dimensional orthogonal moment in any space force system, and plays an extremely important role in the fields of contour tracking, precision assembly, collision detection, robot collaboration, etc., precision machining, aerospace and other fields. Among them, capacitive six-dimensional force sensor has been widely used because of its good dynamic performance and non-contact measurement. However, in the related art, the capacitive six-dimensional force sensor usually needs at least six capacitors for detection, the structure is complex, and the volume is relatively large, so that the use of the capacitive six-dimensional force sensor is limited. SUMMARY OF THE INVENTION [0003] The present invention aims to solve at...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01L5/165
CPCG01L5/165
Inventor 蒲明辉张金皓黄伟艾振军蔡宝成梁权
Owner GUANGXI UNIV
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