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Coating cavity cleaning mechanism

A technology of cleaning mechanism and coating cavity, applied in gaseous chemical plating, final product manufacturing, coating and other directions, can solve the problems of increasing cleaning gas cost, film accumulation to four corners, affecting product quality, etc. The effect of scientific design and saving assembly time

Pending Publication Date: 2022-07-12
明德润和机械制造(天津)有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

As attached to the manual figure 1 As shown, in the prior art, the clean gas NF 3 Radiation diffuses from the center of the chamber to the outside, and it is easy to accumulate the film layer to the four corners, and then produce particles that affect product quality
Therefore, in order to ensure product quality, it is necessary to prolong the cleaning time, and the prolongation of the cleaning time will cause the cleaning gas NF 3 The cost increases and the production capacity is limited, and even if the cleaning time is prolonged, due to the restriction of the diffusion direction of the cleaning gas, the four corners of the chamber are still prone to film accumulation

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0024] A coating cavity cleaning mechanism, which is arranged in a rectangular coating cavity A, comprises: a dry pump 5 arranged at the bottom of the coating cavity A, a drainage unit arranged on the four inner walls of the coating cavity A, and four drainage units respectively arranged in the coating cavity A. The air collecting hood 6 at the four corners and connected with the dry pump 5, the drainage unit is the drainage plate 1, and the drainage plate includes an L-shaped vertical plate 11 and a horizontal plate 12.

[0025] The setting position of the drain plate 1 in the coating chamber A is as follows: figure 2 As shown, the setting positions of the dry pump 5 and the gas collecting cover 6 in the coating chamber A are as follows Figure 5 shown. When cleaning, clean gas NF 3 Pass into the center of the glass M to be coated, and then naturally diffuse to the four drainage plates 1, drain through the vertical plate 11 and under the guidance of the gas collecting hood...

Embodiment 2

[0027] On the basis of Embodiment 1, a support bracket 3 is also included, and the guide plate 1 is fixedly connected to the inner wall of the coating chamber A through the support bracket 3 . like image 3 and Figure 4 Commonly shown: Specifically, the support bracket 3 includes an L-shaped side bracket 31 and a bottom bracket 32, the outer side of the side bracket 31 is provided with a threaded connector 4 for connecting with the inner wall of the coating cavity A, and the vertical plate 11 passes through The hook 2 is fixedly connected to the inner side of the side bracket 31 , and a receiving cavity for placing the bottom bracket 32 ​​is provided on the horizontal plate 12 . The drainage plate 1 is installed on the hook 2, the hook 2 is fixed on the support bracket 3, and the support bracket 3 is fixed on the inner wall of the coating cavity A through the screw connection 4, and the installation operation is fast and convenient.

Embodiment 3

[0029] On the basis of Embodiment 2, the upper surface of the bottom bracket 32 ​​is slightly higher than the upper surface of the horizontal plate 12 . In use, the shielding frame B is installed on the bottom bracket 32, so the bottom bracket 32 ​​is stressed, and the support bracket 3 can be directly replaced if it is deformed during long-term use, without replacing the drainage plate 1.

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Abstract

The invention provides a coating cavity cleaning mechanism which is arranged in a rectangular coating cavity and comprises a dry pump arranged at the bottom of the coating cavity, drainage units arranged on four inner walls of the coating cavity and gas collecting hoods arranged at four corners of the coating cavity respectively and connected with the dry pump, the drainage units are drainage plates, and each drainage plate comprises an L-shaped vertical plate and an L-shaped horizontal plate. According to the method, the utilization rate of NF3 is increased, the cleaning effect is improved, and the product quality can be improved; the whole structure is simple, the design is scientific, a quick-assembly mode is adopted, quick-wear parts are designed to be replaceable structures, the assembly time is saved, and the use cost is also saved.

Description

technical field [0001] The invention relates to the technical field of CVD coating, in particular to a coating cavity cleaning mechanism. Background technique [0002] When coating in a CVD chamber, a large amount of film will be attached to the chamber. In order to ensure the cleanliness of the chamber, it is necessary to use a clean gas NF 3 Clean the chamber. Attached to the manual figure 1 As shown, in the prior art, the clean gas NF 3 Radiating diffusion from the center of the chamber, it is easy to accumulate the film layer to the four corners, and then produce particles that affect the quality of the product. Therefore, in order to ensure product quality, it is necessary to prolong the cleaning time, and the prolongation of cleaning time will not only lead to cleaning gas NF 3 The increase in cost also limits the production capacity, and even if the cleaning time is prolonged, film accumulation is still prone to occur at the four corners of the chamber due to the ...

Claims

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Application Information

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IPC IPC(8): C23C16/44C23C16/455
CPCC23C16/4405C23C16/45591Y02P70/50
Inventor 周磊窦沛静段琳琳丁媛
Owner 明德润和机械制造(天津)有限公司
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