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Method, device and equipment for processing animation data in semiconductor process equipment

A technology of process equipment and data processing, which is applied in image data processing, animation production, instruments, etc., can solve the problems of low development efficiency and poor applicability of equipment, and achieve the effect of improving applicability and development efficiency

Pending Publication Date: 2022-07-15
XIAN NAURA MICROELECTRONICS EQUIP CO LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] During the working process of the device, the device software will control the animation unit to display different effects according to the feedback signal transmitted by the specific hardware. The development of the animation unit is an important part of the development of the device software, but the development of the existing animation unit is suitable for the device. Poor performance and low development efficiency

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  • Method, device and equipment for processing animation data in semiconductor process equipment
  • Method, device and equipment for processing animation data in semiconductor process equipment
  • Method, device and equipment for processing animation data in semiconductor process equipment

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Embodiment Construction

[0045] In order to make the above objects, features and advantages of the present invention more clearly understood, the present invention will be described in further detail below with reference to the accompanying drawings and specific embodiments. Obviously, the described embodiments are some, but not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0046] The development of a software animation unit for semiconductor devices can be divided into 4 stages:

[0047] 1. Disassemble the basic modules of the whole machine, distinguish typical small modules such as process chambers and manipulators, and draw corresponding schematic diagrams, develop software for the disassembled small modules, and give different small modules logical control.

[0048] 2. Module reorganization,...

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Abstract

The embodiment of the invention provides a method, a device and equipment for processing animation data in semiconductor process equipment. The method comprises the following steps: acquiring a configuration file corresponding to semiconductor equipment; according to the configuration file, displaying a distribution view of each component in the semiconductor equipment; in response to a moving operation on a target component, displaying a moving process of the target component in the distribution view, and determining current position information of the moved target component; and generating animation data according to the current position information. Through the embodiment of the invention, the development of the software animation unit for the semiconductor equipment is optimized, software is generated in the form of the configuration file, different equipment debugging requirements are met, the applicability to different equipment is improved, a user can visually check the moving process of each component, and the user experience is improved. Therefore, the animation data can be obtained more conveniently, and the development efficiency is improved.

Description

technical field [0001] The present invention relates to the field of semiconductor technology, and in particular, to a method, device and device for animation data processing in semiconductor process equipment. Background technique [0002] For semiconductor equipment, the working mode is usually that the robot (Robot) transfers the wafer (Wafer) at the specified position to the process chamber for process processing, and then transfers the completed wafer back to the specified position. Semiconductor equipment is generally processed by the process. It is composed of multiple fixed-position modules such as chambers, transfer chambers, and loading chambers, rotatable and retractable robots, and wafers that need to be transferred. [0003] In order to improve the user experience of software for semiconductor equipment, the interface of the equipment software will include animation units. The appearance of the animation unit is a sketch of the overall composition of the equipme...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G06T13/00
CPCG06T13/00
Inventor 宫兆辉
Owner XIAN NAURA MICROELECTRONICS EQUIP CO LTD