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Heat treatment device

A technology of heating treatment and heating section, which is applied in the direction of pretreatment surface, device for coating liquid on the surface, coating, etc., which can solve the problem of decreased production efficiency and achieve the effect of uniform cooling

Pending Publication Date: 2022-08-02
SHIBAURA MECHATRONICS CORP
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

But if so, the production efficiency will drop

Method used

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Embodiment Construction

[0073] Hereinafter, embodiments will be illustrated with reference to the drawings. In addition, in each drawing, the same code|symbol is attached|subjected to the same structural element, and a detailed description is abbreviate|omitted suitably.

[0074] Hereinafter, as an example, a heat treatment apparatus for forming an organic film on a surface of a workpiece by heating a workpiece under a relatively high pressure and reduced pressure environment will be described, but the present invention is not limited to this. For example, the present invention can also be applied to a heat treatment apparatus that heats a workpiece in an atmosphere in which a relatively large air pressure is reduced to form an inorganic film or the like on the surface of the workpiece or treat the surface of the workpiece. In addition, the workpiece before heating may be, for example, one having a substrate and a solution applied to the surface of the substrate, or may be only the substrate.

[007...

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Abstract

The invention provides a heat treatment device capable of rapidly and uniformly cooling a heated workpiece. A heat treatment apparatus according to an embodiment includes: a chamber; the supporting part is arranged in the cavity and can support a workpiece; the heating part is arranged in the chamber and can heat the workpiece; and at least one first nozzle provided inside the chamber and capable of supplying cooling gas to the workpiece. The first nozzle is provided at a position not overlapping the workpiece when viewed from a direction perpendicular to the surface of the workpiece. The first nozzle is inclined with respect to a surface of the workpiece to which the cooling gas is supplied.

Description

technical field [0001] Embodiments of the present invention relate to a heat treatment apparatus. Background technique [0002] There is a heat treatment apparatus which heats a workpiece to form a film or the like on the surface of the workpiece or treat the surface of the workpiece. In such a heat treatment apparatus, for example, when the processed workpiece is unloaded from the heat treatment apparatus, the heated workpiece may be rapidly and uniformly cooled. Also, for example, it is sometimes necessary to solidify the material on the surface of the workpiece by cooling the heated workpiece to form a film or the like. [0003] Therefore, a technique has been proposed in which a plurality of nozzles are provided on the back side of the workpiece, and cooling gas is sprayed on the workpiece from a direction perpendicular to the back side of the workpiece (for example, see Patent Document 1). [0004] However, when the cooling gas is sprayed on the workpiece from a direc...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B05D3/02B05D3/04
CPCB05D3/0254B05D3/0426H01L21/67098H01L21/67017H01L21/6875
Inventor 山崎修
Owner SHIBAURA MECHATRONICS CORP