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Communication fault processing method and connector assembly thereof

A technology for communication faults and components, applied in instruments, measuring devices, electronic circuit testing, etc., can solve the problems of torque sensor line transmission signal interference and other problems, and achieve the effect of solving the interference of internal line transmission signals

Pending Publication Date: 2022-08-02
HUA HONG SEMICON WUXI LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The embodiment of the present invention provides a communication fault handling method and its joint assembly, which can solve the problem of the interference of the transmission signal of the internal line of the torque sensor caused by the long-term rotation of the gripper device in the related art

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  • Communication fault processing method and connector assembly thereof
  • Communication fault processing method and connector assembly thereof
  • Communication fault processing method and connector assembly thereof

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Embodiment Construction

[0019] In order to make the objectives, technical solutions and advantages of the present invention clearer, the embodiments of the present invention will be further described in detail below with reference to the accompanying drawings.

[0020] As used herein, "plurality" refers to two or more. "And / or", which describes the association relationship of the associated objects, means that there can be three kinds of relationships, for example, A and / or B, which can mean that A exists alone, A and B exist at the same time, and B exists alone. The character " / " generally indicates that the associated objects are an "or" relationship.

[0021] It should be noted that, in this application, force peak is interpreted as the peak value of force, and Torque peak is interpreted as the peak value of torque.

[0022] Please refer to figure 1 , which shows a schematic structural diagram of a joint assembly for communication fault handling according to an exemplary embodiment of the presen...

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Abstract

The invention discloses a communication fault processing method and a connector assembly thereof, and belongs to the field of semiconductor manufacturing. The assembly comprises a power supply pin, a resistor pin, a voltage input pin and a grounding pin, a target voltage is input into the power supply pin; the resistor pin is connected with a target resistor; zero-volt voltage is input into the voltage input pin. Voltage and resistance of a torque sensor are adjusted to be target voltage and target resistance respectively, the target voltage is input to a power supply pin, a resistor pin is connected with the target resistor and a voltage input pin to input zero-volt voltage, and the communication fault condition of the photomask transmission unit is determined according to a return value of the torque sensor. The communication condition of the torque sensor is monitored, and the internal line condition is fed back through the return value of the torque sensor, so that the problem that transmission signals of the internal line of the torque sensor are interfered due to long-term rotation of the gripper device in the related technology is solved.

Description

technical field [0001] Embodiments of the present invention relate to the field of semiconductor manufacturing, and in particular, to a communication fault handling method and a connector assembly thereof. Background technique [0002] The exposure machine needs a wafer and a mask when exposing the wafer, and the transfer of the mask is mainly completed by a robotic arm. [0003] The robotic arm is mainly composed of a mask stage and a gripper device. The reticle stage is used to lift and lower the reticle chamber so that the gripper device can enter the reticle chamber to take out the reticle, and transfer the reticle from the reticle stage to the position where the photomask is exposed. [0004] When the machine is corrected to each unit position, the gripper device needs to collide with the frame, and the torque sensor detects the magnitude of the force to record the coordinate position of the machine. Because the gripper device often rotates, the gripper device is parti...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01R19/175G01R31/28
CPCG01R19/175G01R31/2801
Inventor 徐新吴海华吴长明葛斌高中原
Owner HUA HONG SEMICON WUXI LTD
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