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Normal atmosphere plasma producer

A technology of atmospheric pressure plasma and plasma, which is applied in the direction of plasma, semiconductor/solid-state device manufacturing, discharge tube, etc., can solve problems such as object damage, and achieve the effect of inhibiting the accumulation of static charge

Inactive Publication Date: 2005-12-14
WEIHAI DMS OPTICAL ELECTROMECHANICAL CO LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] That is to say, when the surface state of the object to be treated changes or the existing atmospheric pressure plasma generator is used to remove pollutants and particles, the object may be discharged by the accumulated high static charge on the surface of the object and the state of the object. and damaged

Method used

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Embodiment Construction

[0030] The preferred embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings. Furthermore, the present invention can be implemented in many different ways and is not limited to the embodiments described herein. In addition, the contents disclosed in these embodiments are exhaustive and complete, and fully convey the contents of the present invention to those skilled in the art. In the drawings, the shapes of elements are exaggerated for clarity. To facilitate understanding, the same reference numerals are used for the same components in the drawings.

[0031] image 3 Shown is an atmospheric pressure plasma generator corresponding to a preferred embodiment of the present invention, Figure 4 Shown is that the potential varies with the object and image 3 Schematic diagram of the variation of the distance between the atmospheric pressure plasma generators shown. refer to image 3 and Figure 4 , the atmospheric pr...

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Abstract

PURPOSE: An atmospheric pressure plasma generating apparatus is provided to control the number of ions and electrons reaching the surface of a process target by independently controlling a potential difference between a plasma potential and each electrode. CONSTITUTION: The atmospheric pressure plasma generating apparatus injects gas to a gap between an anode(120) and a cathode(110) to generate plasma(160) so that the surface of the process target(170) is processed. Alternating current(AC) power(140,150) with different frequencies is respectively applied to the anode and the cathode to independently control the potential difference between the plasma potential and the anode / cathode.

Description

technical field [0001] The present invention relates to a plasma generator, in particular, the present invention relates to a plasma generator capable of generating plasma under atmospheric pressure. Background technique [0002] Generally, the high temperature of the discharged plasma can be used for cutting, welding and burning of metals. In addition, the active particles generated in the plasma can be used in chemical reactions. For example, plasma can be used to alter the surface state of an object to be treated to remove contaminants and particles from the surface of the object. [0003] FIG. 1 shows a normal-pressure plasma generator corresponding to the prior art, and FIG. 2 shows a schematic diagram of changes in electric potential with the distance of an object from the normal-pressure plasma generator shown in FIG. 1 . 1 and 2, the existing atmospheric pressure plasma generator provides an alternating current (AC) power supply 40 with a frequency ranging from ten...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/00H05H1/24H05H1/34
CPCH01J37/32009H01J37/32532
Inventor 林庸硕金东吉
Owner WEIHAI DMS OPTICAL ELECTROMECHANICAL CO LTD