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Wedge shaped reaction tube in use for equipment of metal organic chemical vapor deposition

A metal-organic chemistry and vapor deposition technology, applied in the field of reaction tubes, can solve problems such as difficult to achieve, reduce pre-reaction, and uniform mixing of reaction gases, and achieve the effects of improving uniformity, reducing pre-reaction, and convenient sampling

Active Publication Date: 2006-09-20
南昌硅基半导体科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

At present, most of the quartz reaction tubes in metal-organic chemical vapor deposition equipment at home and abroad are designed as horizontal or vertical, which is difficult to achieve the purpose of effectively reducing the pre-reaction and mixing the reaction gas evenly.

Method used

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  • Wedge shaped reaction tube in use for equipment of metal organic chemical vapor deposition

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Embodiment Construction

[0010] The present invention will be described in further detail below in conjunction with the embodiments and with reference to the accompanying drawings.

[0011] The present invention includes a quartz tube 23, an induction coil 22, a left air inlet pipe 1, a right air inlet pipe 2, an air outlet pipe 13, a substrate 11, a graphite boat 10, an upper flange 12, an annular lower flange 17 and a lower sealing plate 16 , the upper and lower ends of the quartz tube 23 are respectively the upper flange 12 and the lower flange 17 and are in sealing contact with the upper flange 12 and the lower flange 17, and there is a reaction between the upper flange 12, the lower flange 17 and the quartz tube 23 Chamber 21, the quartz tube 23 is covered with a cylindrical helical tubular induction coil 22 with cooling water in the middle, and the left inlet pipe 1, right inlet pipe 2 and outlet pipe 13 are installed on the upper flange 12, and are installed in the reaction chamber 21. There is...

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Abstract

This invention discloses a wedge reaction pipe used in metal organic chemical gas phase deposition device including a quartz capsule, an induction coil, gas inlet pipe, an escape pipe, a substrate, a graphite boat, an upper flange and a lower flange, among which, the induction coil sheaves the quartz capsule characterizing in mounting a cylindrical mask in the reaction chamber, a baffle isolates the gas inlet cavity into a left and a right inlet cavities, the escape cavity communicates with the escape pipe of the mask. The cylindrical mask of a tilt top plate forms a wedge reaction cavity with the substrate, the inlet is wider than the outlet. A substrate rotation device is also designed here and the lower flange is mounted on the arm of the lifter.

Description

technical field [0001] The invention relates to a reaction tube, in particular to a wedge-shaped reaction tube used in metal organic chemical vapor deposition equipment. Background technique [0002] When using metal-organic chemical vapor deposition equipment (MOCVD) to prepare semiconductor thin film materials, different reaction gases need to be sent into the reaction chamber respectively, and then the reaction gases are mixed on the substrate surface, and at the same time, the gas flow is kept in good condition when flowing through the substrate. Laminar flow state, so as to grow thin film materials with excellent performance. At present, most of the quartz reaction tubes in metal-organic chemical vapor deposition equipment at home and abroad are designed as horizontal or vertical, which is difficult to achieve the purpose of effectively reducing the pre-reaction and mixing the reaction gas evenly. Contents of the invention [0003] The object of the present invention...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C16/455C23C16/18
Inventor 江风益蒲勇熊传兵
Owner 南昌硅基半导体科技有限公司
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