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Piezoelectric driven F-P chamber tunable optical filters and manufacture thereof

A piezoelectric drive and optical filtering technology, which is applied in optical components, optics, nonlinear optics, etc., can solve the problems of low yield, complicated process, and inability to provide in large quantities.

Inactive Publication Date: 2006-10-11
SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

But this scheme generally adopts surface technology (A.Spisser, etc.IEEE Photon.Technol.Lett., vol.10, pp.1259-1261, Sept.1998; A.T.T.D.Tran, etc.IEEE Photon.Technol.Lett., vol.8, pp.393-395, Sept.1996) or bulk silicon bonding process (J.S.Harper, etc.Electronics Letters, Vol.25, No.16, 3rd August 1989; J.H.Jerman, etc.Sensors and Actuators A , vol.29, pp 151-158, 1991), the process is complicated, the yield is low, and the performance of the device is greatly affected by external environmental factors, such as temperature, humidity, vibration, etc., and its reliability needs further inspection
Although there are individual companies selling this type of tunable filter in the market, they are not suitable for mass supply due to the high price.
There is still a certain gap from the actual requirements of the optical communication market

Method used

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  • Piezoelectric driven F-P chamber tunable optical filters and manufacture thereof
  • Piezoelectric driven F-P chamber tunable optical filters and manufacture thereof
  • Piezoelectric driven F-P chamber tunable optical filters and manufacture thereof

Examples

Experimental program
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Effect test

Embodiment 1

[0031] Embodiment 1 The present invention provides such as figure 1 (b) Piezoelectrically driven FP cavity tunable optical filter structural unit. This structure is composed of A, B, and C, which are tightly combined. A can be silicon, glass or other bulk materials that are easy to be processed by micromachining. B is piezoelectric material, and C is SOI silicon wafer. A has an upper silicon body 1, an upper anti-reflection film 2, an upper high-reflection film 3, a metal upper electrode 4 at the left end, and a metal upper electrode 5 at the right end. There are five parts in total; There are five parts including a piezoelectric body 6, a piezoelectric body upper metal 7, a piezoelectric lower metal layer 8, and an upper glue layer 9 and a lower glue layer 10 for bonding with parts A and C; Silicon layer 11, high platform 12, lower high-reflection film 13, lower anti-reflection film 14, left end metal lower electrode 15, right end metal lower electrode 16 and other six parts...

Embodiment 2

[0048] Example 2 as Figure 7 As shown, the center of the lower surface of the upper silicon body 1 in this embodiment is a concave cylindrical surface, spherical surface or approximately cylindrical surface, spherical surface 22, and its normal direction is perpendicular to another plane, forming a "flat-concave" FP resonant cavity.

[0049]Others of this embodiment are the same as embodiment 1.

Embodiment 3

[0050] Embodiment 3 Replace the SOI silicon wafer made in part C in Examples 1 and 2 with an ordinary silicon wafer, and use the ordinary silicon wafer to etch or etch a certain depth of the barrier block 17 first, and the bottom surface after the barrier block 17 is etched The polishing process is then performed to improve the surface quality, and other structures such as the high platform 12 and the bottom silicon layer 11 are produced by using a corrosion or etching process. Others are with embodiment 1,2.

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Abstract

The invention provides a Fabry-Perot (FP) cavity tunable optical filter device and a manufacturing method. It is characterized in that it combines the stability of the piezoelectric driving method with the advantages of MEMS batch processing, and adopts a special block structure design to ensure the parallelism of the two parallel mirror surfaces of the cavity, which reduces the difficulty of assembly and ensures device performance. The provided FP cavity is composed of two piezoelectric blocks disassembled, an upper high-reflective film and a lower high-reflective film. The upper high-reflection film is either planar or concave spherical and cylindrical, or concave approximately spherical and cylindrical, forming a planar or "flat-concave" FP resonator respectively. The process of the invention has simple structure, low cost, no thin beams and other components easily affected by the outside, small volume, easy mass production, stable and reliable devices, and excellent performance.

Description

technical field [0001] The invention relates to a novel Fabry-Perot cavity (Fabry-Perot, hereinafter referred to as FP) tunable optical filter device in the technical field, more precisely, the invention relates to a piezoelectric-driven FP cavity tunable optical filter A device and a manufacturing method belong to the field of micromechanical structures. Background technique [0002] With the rapid growth of global communication traffic, the market urgently needs an intelligent optical communication system capable of high-speed and large-scale transmission of information. The tunable optical filter with excellent performance is an important component of wavelength division multiplexing (WDM) and dense wave in optical communication systems. The core components of key equipment such as division multiplexing (DWDM), optical add-drop multiplexing module (OADM), optical cross-connect (OXC), optical performance monitor (OPM), and tunable optical transceiver (Tunable Optical Trans...

Claims

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Application Information

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IPC IPC(8): G02B26/00G02B6/26H04J14/02G02B6/30G02F1/035
Inventor 向民吴亚明李毅王跃林
Owner SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI