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Material-saving type atomic beam generator

A technology of atomic beams and generators, applied in the field of material-saving atomic beam generators, which can solve the problems of high material consumption and short time for continuous spraying of atomic beams, and achieve the effects of prolonged spraying time, low material consumption, and reduced costs

Inactive Publication Date: 2006-11-29
INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

These atomic generators capable of generating atomic beams, because the atoms ejected from the injection holes have a large divergence angle, only the atoms with small divergence angles can be really used, and most of the atoms with large divergence angles are blocked If it is blocked and wasted, atomic materials need to be added after a short period of continuous work. Therefore, although high-purity atomic materials are relatively expensive, these devices still have the disadvantages of high material consumption and short time for continuous spraying of atomic beams.

Method used

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  • Material-saving type atomic beam generator
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  • Material-saving type atomic beam generator

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Embodiment Construction

[0009] Such as figure 1 As shown, the material-saving atomic beam generator consists of a double heating crucible furnace and a vacuum chamber 8, and the double heating crucible furnace is composed of a crucible 4, an external heating body 5, an internal heating body 6, a crucible cover 16 and a crucible inner core 14 . The crucible 4, the external heating body 5, and the internal heating body 6 are placed together on the furnace floor 2 of the double-heating crucible furnace, together with the heat insulation sleeve 3 between the double-heating crucible furnace and the shell 1, through the furnace bottom plate 2 and the double-heating crucible furnace The shell 1 is connected, and the shell 1 of the double-heating crucible furnace is closely connected with the vacuum cavity 8, so that the crucible inside the furnace and the vacuum cavity 9 simultaneously form a vacuum inner cavity. The inner wall interlayer around the shell 1 of the double heating crucible furnace is provide...

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Abstract

A material saved atomic beam generator is composed of a pot, a pot inner core, a double heating pot oven with inner and outer heating units, an oven bottom plate, a thermal sleeve and a vacuum cavity, among which, the atomic beam is sprayed into the cavity via the inner core and two jet-burners, most part of atoms sprayed from the pot inner core can't be sprayed from the second jet-burner due to the large divergence-angle and flows down along the internal wall to be recovered and used in circulation.

Description

technical field [0001] The invention is a material-saving atomic beam generator, which belongs to the technical field of atomic beam generation. Background technique [0002] With the development of modern science and technology, people use the magneto-optical field to control atoms and make various ultra-fine graphics. In order to generate an atomic beam, it is generally generated using an atom generator that heats a local atomic material of the vacuum system. These atomic generators capable of generating atomic beams, because the atoms ejected from the injection holes have a large divergence angle, only the atoms with small divergence angles can be really used, and most of the atoms with large divergence angles are blocked If it is blocked and wasted, atomic materials need to be added within a short time of continuous work. Therefore, although high-purity atomic materials are relatively expensive, these devices still have the disadvantages of high material consumption and...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H05H3/02G03F7/20
Inventor 陈旭南姚汉民李展罗先刚石建平陈献忠陈元培高洪涛秦涛
Owner INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI