Optical modulator
A technology of optical modulators and optical waveguides, which can be used in instruments, optics, nonlinear optics, etc.
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[0020] Hereinafter, the present invention will be described in detail using appropriate examples.
[0021] The substrate constituting the optical modulator is made of materials with electro-optical effects, such as lithium niobate (LiNbO 3 , hereinafter referred to as LN), lithium tantalate (LiTaO 3 ), PLZT (lead lanthanum zirconate titanate) and quartz materials, specifically, the X-direction cutting plate, Y-direction cutting plate and Z-direction cutting plate of these single crystal materials. In particular, it is preferable to use LiNbO because it is easy to form an optical waveguide device and has a large anisotropy. 3 Crystalline, LiTaO 3 crystalline, or by LiNbO 3 and LiTaO 3 Formed solid solution crystallization. In this embodiment, an example using lithium niobate (LN) will be mainly described.
[0022] As a method of manufacturing an optical modulator, there are the following methods, namely,
[0023] Thermally diffuse Ti on the LN substrate to form an optica...
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Abstract
Description
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