Unlock instant, AI-driven research and patent intelligence for your innovation.

Method for retrieving organic compound from photoresist and/or desquamation fluid

An organic compound and photoresist technology, which is applied in the field of complex extraction and its solvent co-extraction of organic compounds, can solve the problems of inability to separate ε-caprolactam, etc., and achieves the effects of small equipment investment and simple process.

Inactive Publication Date: 2007-05-23
上海洁申实业有限公司
View PDF2 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In US-A-4730040, a method for extracting ε-caprolactam from an aqueous mixture containing ε-caprolactam with chloroform is mentioned, but the technology disclosed in this patent cannot separate ε-caprolactam from an aqueous mixture containing resinous oligomers

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0036] Send the photoresist and / or stripping liquid into the complex extraction tower, contact with the combined extractant entering the complex extraction tower in countercurrent, the raffinate enters the subsequent section, and the extract is sent to the stripping tower for separation, and the separated extract The combined extractant in the process is recycled, and the separated organic compound enters the subsequent section for purification;

[0037] The composition and weight content of photoresist and / or stripping solution are:

[0038] 3wt.% of isopropanolamine and dimethylformamide; 0.03% of gallic acid; 0.20% of soluble resinous substances; 0.85% of oligomers; 0.75% of resist light components;

[0039] Components and parts by weight of the main extractant include:

[0040] 0.2 parts of ethylene glycol;

[0041] 0.6 parts of p-toluic acid;

[0042] 0.2 parts of o-toluic acid;

[0043] 2.0 parts of trichlorethylene;

[0044] The extraction temperature is 45°C, and ...

Embodiment 2

[0049] After complex extraction of photoresist and / or stripping solution at 30°C, the raffinate is sent to the stripping tower, organic matter such as ethyl acetate, dimethylformamide, isopropanolamine and extractant such as trichlorethylene After the reversible reaction at a temperature of 110°C, they are recovered separately. Except for the recycling of the extract, the purity of the separated organic matter can be >95%; the recovery rate is >85%

[0050] The contents of organic amines, gallic acid, soluble resin substances, oligomers and photoresist light components in the photoresist and / or stripping solution used in the above method are the same as in Example 1, and the analysis method is also similar.

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

A process for recovering the organic compounds from the used photoresist and / or stripping liquid includes loading said raw material into complex extracting tower, counter current contact with combined extractant, delivering the liquid extract in back extraction tower, and separating organic compounds (isopropanolamine and dimethyl formamide).

Description

technical field [0001] The invention relates to a method for recovering organic compounds from photoresist and / or stripping waste liquid, in particular to a method for complex extraction and its solvent combined extraction of organic compounds. Background technique [0002] Organic compounds in photoresist and / or stripping waste liquid, such as organic amines, are pollutants controlled by the state, and industrial raw materials or organic solvents with high commodity value. [0003] For the recovery of organic amines in photoresist and / or stripping waste liquid, the conventional method is to adopt the multi-purpose three-effect downstream evaporation method, and the concentrated waste water is sent back to the extraction tower, but due to the large amount of waste water and low concentration, it can The consumption is obviously too high. Other adsorption and biochemical treatments are obviously not suitable for direct use in this concentration range. In US-A-4730040, a met...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Patents(China)
IPC IPC(8): C02F1/26B01D11/00
Inventor 朱龙德曹建勤任冠明周霞萍石生东
Owner 上海洁申实业有限公司