Method for retrieving organic compound from photoresist and/or desquamation fluid
An organic compound and photoresist technology, which is applied in the field of complex extraction and its solvent co-extraction of organic compounds, can solve the problems of inability to separate ε-caprolactam, etc., and achieves the effects of small equipment investment and simple process.
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Embodiment 1
[0036] Send the photoresist and / or stripping liquid into the complex extraction tower, contact with the combined extractant entering the complex extraction tower in countercurrent, the raffinate enters the subsequent section, and the extract is sent to the stripping tower for separation, and the separated extract The combined extractant in the process is recycled, and the separated organic compound enters the subsequent section for purification;
[0037] The composition and weight content of photoresist and / or stripping solution are:
[0038] 3wt.% of isopropanolamine and dimethylformamide; 0.03% of gallic acid; 0.20% of soluble resinous substances; 0.85% of oligomers; 0.75% of resist light components;
[0039] Components and parts by weight of the main extractant include:
[0040] 0.2 parts of ethylene glycol;
[0041] 0.6 parts of p-toluic acid;
[0042] 0.2 parts of o-toluic acid;
[0043] 2.0 parts of trichlorethylene;
[0044] The extraction temperature is 45°C, and ...
Embodiment 2
[0049] After complex extraction of photoresist and / or stripping solution at 30°C, the raffinate is sent to the stripping tower, organic matter such as ethyl acetate, dimethylformamide, isopropanolamine and extractant such as trichlorethylene After the reversible reaction at a temperature of 110°C, they are recovered separately. Except for the recycling of the extract, the purity of the separated organic matter can be >95%; the recovery rate is >85%
[0050] The contents of organic amines, gallic acid, soluble resin substances, oligomers and photoresist light components in the photoresist and / or stripping solution used in the above method are the same as in Example 1, and the analysis method is also similar.
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