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Full-fiber nanometer-precision microdisplacement and microvibration interference measuring instrument

An interferometric measurement and micro-displacement technology, applied in measurement devices, instruments, optical devices, etc., can solve problems such as poor anti-interference ability, difficult adjustment, wavelength drift, etc., to reduce adjustment difficulty, save modulation light source, and eliminate light stress. the effect of

Inactive Publication Date: 2002-12-11
SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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AI Technical Summary

Problems solved by technology

It will overcome the problems of adjustment difficulty, wavelength drift and poor anti-interference ability in the above-mentioned prior art

Method used

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  • Full-fiber nanometer-precision microdisplacement and microvibration interference measuring instrument
  • Full-fiber nanometer-precision microdisplacement and microvibration interference measuring instrument

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Embodiment Construction

[0036] Such as figure 1 structure shown. The collimated light source 6 is a semiconductor laser with a wavelength of 660nm and a maximum output power of 30mW. The excitation light source 14 is a semiconductor laser with a wavelength of 785nm and a maximum output power of 50mW. The light source 3 adopts a distributed feedback semiconductor laser (DFB-LD) with a wavelength of 1305 nm. The first photoelectric conversion element 9 and the second photoelectric conversion element 12 are photodiodes, and their wavelength response is in the 1.3 μm band. The first multiplexer element 7, the second multiplexer element 15 and the coupler 8 are all fiber couplers. The splitting ratio of the coupler 8 is 1:1. The diameter of the outgoing beam of the collimator 17 is 0.2 mm. The reflectivity of the partially reflective element 18 is 27%. When starting the measurement, the light source 3 is first turned on, and the temperature of the light source 3 is stabilized by the temperature cont...

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Abstract

The interference instrument includes light source with one first driving power source and temperature controller, collimation light source and excitation light source with different wavelegnth. The full light beam transmitting path is in optical fiber, wave synthesizing element and fiber coupler. Two photoelectronic elements respond only to the light beam emitted by the first mentioned light source and do not respond to the light beam of the last two light sources. There is a phase controller connected between the first driving power source and the A / D converter to control the initial phase. Compared with available technology, the present invention has the advantages of compact structure, small volume, strong anti-jamming capacity, capability of eliminating error caused by drift wavelength, and high measurement precision.

Description

Technical field: [0001] The invention relates to an all-fiber nanometer-precision micro-displacement and micro-vibration interferometer, in particular to a micro-displacement (less than mm order) and micro-vibration (less than mm order) interferometer using sinusoidal phase modulation interferometry Background technique: [0002] In the semiconductor laser interferometer, the optical heterodyne technique used to improve the measurement accuracy can be realized simply by directly modulating the injection current of the semiconductor laser (hereinafter referred to as LD). By modulating the injection current, it is easy to realize the phase modulation of the interference signal, so as to realize the measurement of displacement, distance, surface shape and other parameters with high precision. However, when the injection current of the LD is modulated, its output light intensity is modulated at the same time, which causes a certain measurement error. In order to reduce the meas...

Claims

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Application Information

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IPC IPC(8): G01B9/02
Inventor 王向朝王学锋刘英明钱锋
Owner SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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