Nickel titanium memory alloy and piezoelectric ceramic hetero three step compounding technology

A technology of nickel-titanium memory alloy and piezoelectric ceramics, which is applied in the coating process of metal materials, piezoelectric/electrostrictive/magnetostrictive devices, and the manufacture/assembly of piezoelectric/electrostrictive devices. Effectively solve the problems of physical and chemical compatibility of heterogeneous interface structure and complex process

Inactive Publication Date: 2003-04-16
TIANJIN UNIVERSITY OF TECHNOLOGY
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Problems solved by technology

At present, although there are research reports on related composite processes at home and abroad, the process is relatively complicated an

Method used

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  • Nickel titanium memory alloy and piezoelectric ceramic hetero three step compounding technology
  • Nickel titanium memory alloy and piezoelectric ceramic hetero three step compounding technology

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Embodiment

[0014] Embodiment: a kind of nickel-titanium memory alloy and piezoelectric ceramics heterogeneous three-step composite process (see figure), it is characterized in that it is made up of following three steps:

[0015] The first step: surface treatment of nickel-titanium (NiTi) thin film substrate, the surface treatment of nickel-titanium (NiTi) thin film substrate is chemical treatment, the surface is cleaned, oil stains and oxide scales are removed and a surface with suitable roughness is formed ;

[0016] The above-mentioned surface treatment of the nickel-titanium sheet substrate adopts a chemical treatment method that can be pickling, and the pickling solution is a solution of hydrofluoric acid, nitric acid, and water in a volume ratio of 3:3:4.

[0017] The second step: chemically deposit piezoelectric ceramic lead zirconate titanate (PZT) film on nickel-titanium (NiTi) substrate, that is, obtain piezoelectric ceramic lead zirconate titanate (PZT) film on nickel-titanium...

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Abstract

A heterogeneity three-step complex technology of NiTi memory alloy and piezoelectric ceramics (PZT) includes the following three steps: 1. surface process of NiTi substrate 2. depositing PZT film on NiTi substrate by chemical method 3. formation by in-situ thermal-response, the above mentioned three steps are on air environment and heated with normal furnace with the following advantages: 1. obtaining transition layer of TiO2 ceramic layer and NiTi alloy zone by insitu thermal-response by which to solve the problem of combination of interfaces between NiTi and PZT 2. getting a new functional composite material eg. intelligent damped material.

Description

(1) Technical field: [0001] The invention relates to a preparation process of functional composite materials, in particular to a heterogeneous three-step composite process of nickel-titanium memory alloy and piezoelectric ceramics. (two) background technology: [0002] Both nickel-titanium memory alloy and piezoelectric ceramics are functional materials that are valued by people. But both have their own shortcomings, which are not conducive to the performance of their respective functions. If the two are combined, not only can the advantages be complementary, but also a new functional material system can be obtained, and the application prospect will be greatly improved. However, it is very difficult to combine Nitinol and piezoelectric ceramics, two materials with very different properties. The key is how to ensure the interface structure with physical and chemical compatibility between heterogeneous materials. At present, although there are research reports on related c...

Claims

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Application Information

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IPC IPC(8): C23C16/40C23C16/56H01L41/39
Inventor 刘庆锁
Owner TIANJIN UNIVERSITY OF TECHNOLOGY
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