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Heating method and heater

A technology of heating device and heating method, which is applied to heating methods, electric heating devices, lighting and heating equipment, etc., can solve the problems of time required, difficulty in fully ensuring the uniformity of temperature distribution, etc., and achieve the effect of uniform heating

Inactive Publication Date: 2003-05-14
KOYO THERMO SYST CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, adjustments to the output power of such heaters take time
In addition, when the heating temperature is lower than 250 degrees, it is difficult to fully ensure the uniformity of the temperature distribution even if the output power of the heater is adjusted.

Method used

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  • Heating method and heater
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  • Heating method and heater

Examples

Experimental program
Comparison scheme
Effect test

Embodiment

[0033] Figure 6 It shows the changes over time in the temperature and temperature deviation of the glass substrate for flat panel display heated by the heating device 1 of the above-mentioned embodiment. The size of the glass substrate is 730 mm × 920 mm × 0.7 mm, the set temperature of the heater 3 is 230° C., and the gas flow rate is 30 liters per minute. The horizontal axis of the graph is the heating time, the left vertical axis is the surface temperature of the glass substrate, and the right vertical axis is the deviation of the surface temperature of the glass substrate. In the figure, the solid line A is the temperature change with time at the position of the highest surface temperature of the glass substrate, the solid line B is the temperature change with time at the position of the lowest surface temperature of the glass substrate, and the dashed line C is the highest deviation from the glass substrate. The deviation of the set temperature at the surface temperature pos...

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PUM

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Abstract

A heating method and a heating device is provided, which uses a heating device comprising a plurality of panel-like heater (3) spaced side by side to heat objects to be heated (4) arranged oppositely to heating surfaces (3a) of the heaters (3) between adjacent heaters (3). Air with temperature lower than the set temperature of the heats (3) is introduced into air flowing space (20) arranged inside each heater (3), to make the air introduced into the air flowing sapce (20) flow from the center of the heating surfaces (3a) to the circumference thereof.

Description

Technical field [0001] The present invention relates to a method and a device for heating a heating target by using a plurality of plate heaters arranged at a certain interval between each other. For example, it can be used for heating a substrate for flat panel display. Background technique [0002] A heating device equipped with a plurality of plate-shaped heaters arranged at a certain interval between each other is used to heat the heating target arranged between the adjacent heaters and facing the heating surface of the heater. Has been adopted. [0003] In the heating area between the plate heaters adjacent to each other as described above, the heat dissipation in the vicinity of the center of the heater heating surface is less than that in the vicinity of the periphery. Therefore, there is a problem that the uniformity of the temperature distribution of each heating surface is reduced. Therefore, it is considered that the output of each heater is lower in the vicinity of th...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H05B3/20F24D13/04F27B17/00F27D7/00F27D7/02F27D11/02F27D99/00
CPCF27B17/0083F27D7/02F27D11/02F27D99/00H05B3/22
Inventor 长嶋靖
Owner KOYO THERMO SYST CO LTD