Driving apparatus, exposuring apparatus and device producing method

Abstract

The object of the present invention is to counteract or reduce the influence of the moment reaction forces accompanying the actuation of the body. The driving device of the present invention includes a first actuator for driving an object (XY slide, etc.) in the X direction, a second actuator for driving the object in the Y direction, and a control unit for controlling the first and second actuators. The first and second actuators each have a reaction balance body that moves upon receiving a reaction force when the object is driven. The control unit controls the first and second actuators to move the upper body which is stationary at point A to stationary at point B, so that the object moves on a straight line connecting point A and point B.

Description

technical field [0001] The present invention relates to a driving device, an exposure device and a device manufacturing method, such as a driving device for moving an object along a guide surface in the X direction and the Y direction, an exposure device incorporating the driving device, and a device manufacturing method using the exposure device . Background technique [0002] As a typical exposure device used in the manufacture of devices such as semiconductor devices, a substrate (substrate) (for example, a wafer or a glass substrate) is moved step by step, and the original plate (reduced plate) is projected by the projection optical system. or mask) patterns are projected on multiple exposure areas on the substrate and sequentially transferred step-and-repeat exposure device (also known as a step projection exposure machine) and the original pattern by repeated step movement and scanning exposure A step-and-scan type exposure device (also known as a scanning projection ...

AI Technical Summary

Problems solved by technology

[0007] In addition, the increase in the size of the equipment is also becoming more and more serious, and the problem of increasing the occupied installation area in the manufacturing factory where a large number of manufacturing equipment is installed is becoming more and more serious.

That is to say, if the vibration transmitted from the device to the foundation bed is large, in order to prevent other devices from being affected by the vibration, the distance between the devices must be increased, and as a result, the actual area occupied by each device will increase.

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