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Method of integration and automation operation and system

An operational and overall technology, applied in special data processing applications, instruments, electrical digital data processing, etc., can solve the problems of delay in the improvement of the production process pass rate, time delay in the analysis of test results, etc., so as to reduce the time spent on empty space , Improve real-time, real-time production process effects

Inactive Publication Date: 2004-02-18
MACRONIX INT CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

As a result, the analysis time of the test results will be delayed, and the opportunity to improve the yield of the manufacturing process will also be delayed

Method used

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  • Method of integration and automation operation and system
  • Method of integration and automation operation and system
  • Method of integration and automation operation and system

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Embodiment Construction

[0027] Before the present invention is further explained, since there are many types of monitoring systems used in the semiconductor manufacturing process, it is impossible to give examples one by one. Therefore, in this specification, only the Advantest test system is used as an example to explain the concept provided by the present invention. Those skilled in the art will know that this concept can be applied to other monitoring systems.

[0028] Please refer to figure 2 , which shows a block diagram of the system architecture according to a preferred embodiment of the present invention. In this embodiment, the system 20 includes an overall server 200 , a man-machine interface 210 , an Advantest machine 220 and a test socket 230 . Wherein, the test seat 230 is controlled by the Advantest machine 220 for testing operation. Before starting the test, the operator can select / input one or several default values ​​through the man-machine interface 210 . These default values ​​...

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Abstract

The system utilizes man-machine interface to input deault and integrated server is used to store parmaeter and operating program as well as to take off corresponding parameter and operating program according to the default inputted by the man-machine interface. In addition, a storage region is provided by the system as it can be disposed with different operation path for different product lot number. The obtained parameter, operating program and operation result can be stored in the operating path as the operation result is stored in the integrated server at real-time.

Description

technical field [0001] The present invention relates to a method and system for integrating semiconductor manufacturing processes, and in particular to a method and system for integrating and automating operations. Background technique [0002] In the current semiconductor system, there are many measuring or testing systems. For example, the Advantest system is one of many semiconductor testing systems. Please refer to figure 1 , this figure simply shows the block diagram of the Advantest system currently in use. as figure 1 As shown, the currently used Advantest system 10 includes an overall server 100 , a man-machine interface 102 , an Advantest machine 104 and a test socket 106 . Among them, the man-machine interface 102 is used to allow the operator to input various necessary parameters for testing, such as packaging method, testing speed, and testing procedures used in testing. However, inputting these parameters purely by manual means not only does not meet the tim...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G06F17/00H01L21/00
Inventor 唐山河胡志峰黄智盈茆世民
Owner MACRONIX INT CO LTD