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Structure of non-volatility memory and its operation method

A non-volatile, operating method technology, applied in the structural field of non-volatile memory, can solve the problems of cumbersome programming steps, high resistance, inability to improve the operation speed of memory cells, etc. Effect

Inactive Publication Date: 2004-02-25
MACRONIX INT CO LTD
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  • Abstract
  • Description
  • Claims
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Problems solved by technology

Thus making the programming steps more troublesome
[0009] On the other hand, the above-mentioned known silicon nitride read-only memory array uses buried source lines and buried bit lines, so its resistance is high, and the operation speed of the memory cells cannot be improved.

Method used

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  • Structure of non-volatility memory and its operation method
  • Structure of non-volatility memory and its operation method
  • Structure of non-volatility memory and its operation method

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Embodiment Construction

[0054] Figure 2A and Figure 2B It is respectively a top view and a cross-sectional view of the structure of the non-volatile memory of the present invention. exist Figure 2A and Figure 2B , the same components are given the same numbers.

[0055] First, please refer to Figure 2A and Figure 2B , the structure of the non-volatile memory of the present invention can be divided into a memory cell array area 100 and a peripheral circuit area 102 . In the memory cell array region 100, a plurality of memory cells 104, a plurality of word lines (Word Line) 106, a plurality of local source lines (Local Source Line) 108, and a plurality of local drain lines (Local Drain Line) 110 are included, The material of the local source lines 108 and the local drain lines 110 is preferably metal. The peripheral circuit area 102 includes a plurality of source line selection transistors 112, a plurality of drain line selection transistors 114, a global source line (Global Source Line) 1...

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Abstract

The present invention relates to a non-volatile memory structure and its operation method. The structure of non-volatile memory is formed from several memory locations, several character lines, several drain lines and several source lines. The several memory locations are formed into several memory location groups by using every two memory locations as one group, these memory location groups are parallelly-arranged into a row-column array, all the memory locations in all the memory location groups in every row share a source zone, and adjacent two memory location groups in every row share a drain zone, and the source zone of every memory location of every memory location group in every row is respectively coupled to its correspondent source line, and the drain zone is respectively coupledto its correspondent drain line.

Description

technical field [0001] The present invention relates to the structure and operation method of a non-volatile memory (Non-Volatile Memory), and in particular to an electrically erasable and programmable The structure and operation method of Electrically Erasable Programmable Read Only Memory (EEPROM). Background technique [0002] The electrically erasable and programmable read-only memory in the non-volatile memory has the advantage of being able to store, read, and erase data multiple times, and the stored data will not disappear after power off. Therefore, it has become a memory element widely used in personal computers and electronic equipment. [0003] A typical electrically erasable and programmable read-only memory uses doped polysilicon to make a floating gate (Floating Gate) and a control gate (Control Gate). When the memory is programmed, the electrons injected into the floating gate are uniformly distributed throughout the polysilicon floating gate layer. Howeve...

Claims

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Application Information

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IPC IPC(8): H01L21/8239H01L21/8247H01L27/105H01L27/115
Inventor 蔡文哲叶致锴卢道政
Owner MACRONIX INT CO LTD
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